Sensors, methods of making and devices
A sensor, source sensor technology, used in measurement devices, instruments, scientific instruments, etc., to solve problems such as limitations, sensitivity, and reproducibility
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[0020] The disclosed sensors may include at least one resonator (in some embodiments, at least two resonators) and various other structures that may be associated with the resonators. At least one resonator in an embodiment may include a bottom electrode, a piezoelectric layer, and a top electrode.
[0021] In some embodiments, the disclosed sensor can include at least first and second resonators, an oxygen-containing layer on one surface of the resonator, a coupling layer on the oxygen-containing layer, and a molecular recognition layer on the coupling layer. image 3 An illustrative embodiment of a sensor 300 including a first resonator 302 , an oxygen-containing layer 340 , a coupling layer 330 , and a molecular recognition layer 320 is described. In some embodiments, the oxygen-containing layer may have only thickness, and in some embodiments no greater than In some embodiments, a sensor may include at least a first resonator having a first surface and an opposing seco...
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