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Visual recognition positioning system for vacuum environment

A technology of visual recognition and vacuum environment, applied in the field of visual recognition and positioning system, can solve problems such as low precision, inability to apply special devices, ordinary cameras and light sources unable to work normally, etc., to achieve the effect of improving production efficiency and prolonging service life

Active Publication Date: 2017-12-01
XINFOO SENSOR TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In the prior art, in order to realize the automation of high-vacuum packaging equipment, mechanical or tool positioning is generally used to complete device positioning. The problem with mechanical or tool positioning is that the accuracy is not high and cannot be applied to some special devices, such as MEMS devices. , the limitations and accuracy of mechanical or tool positioning limit the further automation and intelligent development needs of high vacuum packaging equipment
Therefore, we hope to introduce a visual recognition and positioning system in high vacuum packaging equipment. A typical visual recognition and positioning device is composed of a visual recognition and positioning camera and a light source. Can't work in a vacuum

Method used

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  • Visual recognition positioning system for vacuum environment
  • Visual recognition positioning system for vacuum environment
  • Visual recognition positioning system for vacuum environment

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0023] Example 1: see figure 1 , a visual identification and positioning system for use in a vacuum environment, comprising a visual identification positioning device 10 for identifying and positioning the device to be processed 40, in this embodiment, the visual identification positioning device 10 is composed of a visual identification positioning camera 11 and a visual identification positioning device 10. It is composed of an illumination light source 12 for illuminating the device to be processed. The visual recognition and positioning camera 11 can identify the light emitted by the illumination light source 12 and accurately identify and locate the device to be processed 40 in the lighting environment realized by the illumination light source 12 .

[0024] In the present invention, the used illumination light source 12 may be, but is not limited to, visible light, infrared light, or ultraviolet light. Correspondingly, the visual recognition positioning camera 11 may be a ...

Embodiment 2

[0030] Embodiment 2: In Embodiment 1, the illumination light source 12 and the visual recognition positioning camera 11 are co-located inside the same airtight cavity 20 in order to achieve better illumination effects, but this does not mean that the illumination light source 12 must be It is set together with the visual recognition positioning camera 11 . For example, see image 3 , in this embodiment, the visual recognition positioning camera 11 and the illumination light source 12 are respectively arranged in different sealed cavities under the vacuum environment 100, wherein the visual recognition positioning camera is arranged in the sealed cavity 20a, and the lighting light source 12 is also It is placed in another independent closed cavity 20b and equipped with a cooling device. The positioning surface of the closed cavity 20b facing the device to be processed 40 also has a light-transmitting part, the light-transmitting part can pass through the light emitted by the il...

Embodiment 3

[0031] Example 3: see Figure 4 , the other parts are the same as in Embodiment 1, the difference is: in this embodiment, the visual recognition positioning device 10 is a visual recognition positioning camera 11 placed in a closed cavity, and is provided outside the vacuum environment 100 for illuminating the device to be processed. The illumination light source 12 of 40, the illumination light source may be natural light or artificial illumination light source. When the illuminating light source 12 is an artificial illuminating light source, since it is set in a non-vacuum environment outside the vacuum environment 100, the illuminating light source can be placed at will, as long as the function of illuminating the device to be processed can be realized, and the visual recognition positioning camera can be used. The light emitted by the illumination light source is identified and the device to be processed is identified and positioned under the illumination environment reali...

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Abstract

The invention provides a visual sense identification positioning system used for the vacuum environment, comprising a visual positioning identification device for identifying and positioning a device to be processed; the visual identification positioning device is placed in a sealed cavity body for normal operation; the positioning surface of the sealed cavity which faces the device to be processed is provided with a light transmission part allowing the visual identification positioning device to identify and position the device to be processed; and the sealed cavity is internally provided with a cooling device. In the invention, the visual identification positioning device is placed in the sealed cavity where the atmosphere and the pressure are normal, and an independent cooling device is configured for the sealed cavity, which enables the visual sense identification positioning system to finish the static or the dynamic visual identification and high accuracy positioning under the vacuum environment, helps the device to better finish the movements of grabbing and welding, dramatically improves the production efficiency and particularly adapts to the vacuum, high accuracy and high automation devices for packaging, welding, testing, etc.

Description

technical field [0001] The invention relates to a visual identification and positioning system, in particular to a visual identification and positioning system used in a vacuum environment. Background technique [0002] MEMS vacuum packaging is a packaging technology that uses a sealed cavity to provide a high airtight vacuum environment. Vacuum packaging makes the movable part of the MEMS device work in a vacuum environment, which ensures the quality factor of the MEMS device. MEMS packaging occupies a very important position in the production process of MEMS devices and is a key step for the practical application of devices. [0003] The vacuum packaging of MEMS devices requires high vacuum packaging equipment for welding, testing and other processes, and a high vacuum environment needs to be established inside the packaging equipment. In the prior art, in order to realize the automation of high vacuum packaging equipment, mechanical or tooling positioning is generally us...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B11/00
CPCG01B11/00
Inventor 赵照
Owner XINFOO SENSOR TECH CO LTD