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Visual sense identification positioning system used for vacuum environment

A technology of visual recognition and vacuum environment, applied in the field of visual recognition and positioning system, can solve the problems of low precision, inability to apply special devices, and limit the automation and intelligence of high-vacuum packaging equipment, so as to improve production efficiency and prolong service life. Effect

Active Publication Date: 2016-05-04
XINFOO SENSOR TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In the prior art, in order to realize the automation of high-vacuum packaging equipment, mechanical or tool positioning is generally used to complete device positioning. The problem with mechanical or tool positioning is that the accuracy is not high and cannot be applied to some special devices, such as MEMS devices. , the limitations and accuracy of mechanical or tool positioning limit the further automation and intelligent development needs of high vacuum packaging equipment
Therefore, we hope to introduce a visual recognition and positioning system in high vacuum packaging equipment. A typical visual recognition and positioning device is composed of a visual recognition and positioning camera and a light source. Can't work in a vacuum

Method used

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  • Visual sense identification positioning system used for vacuum environment
  • Visual sense identification positioning system used for vacuum environment
  • Visual sense identification positioning system used for vacuum environment

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0023] Embodiment 1: see figure 1 , a visual recognition and positioning system used in a vacuum environment, including a visual recognition and positioning device 10 for identifying and positioning a device 40 to be processed. In this embodiment, the visual recognition and positioning device 10 consists of a visual recognition and positioning camera 11 and It consists of an illumination light source 12 for illuminating the device to be processed. The visual identification and positioning camera 11 can identify the light emitted by the illumination source 12 and accurately identify and locate the device 40 to be processed under the lighting environment realized by the illumination source 12 .

[0024] In the present invention, the illuminating light source 12 used may be, but not limited to, light sources such as visible light, infrared light, or ultraviolet light. The visual recognition and positioning camera of the camera, so that the visual recognition and positioning devic...

Embodiment 2

[0030] Embodiment 2: In Embodiment 1, the illumination source 12 and the visual recognition positioning camera 11 are jointly arranged inside the same airtight cavity 20, so as to achieve a better illumination effect, but this does not mean that the illumination source 12 must It is set together with the visual recognition positioning camera 11. For example, see image 3 , in this embodiment, the visual recognition and positioning camera 11 and the lighting source 12 are respectively arranged in different airtight cavities under the vacuum environment 100, wherein the visual recognition and positioning camera is set in the airtight cavity 20a, and the lighting light source 12 is also Placed in another independent airtight cavity 20b and equipped with a cooling device, on the positioning surface of the airtight cavity 20b facing the device 40 to be processed, there is also a light-transmitting part, the light-transmitting part can pass through the light emitted by the illuminat...

Embodiment 3

[0031] Embodiment 3: see Figure 4 , the other parts are the same as in Embodiment 1, the difference is that in this embodiment, the visual recognition and positioning device 10 is a visual recognition and positioning camera 11 placed in a closed cavity, and is set outside the vacuum environment 100 for illuminating the device to be processed 40 lighting source 12, the lighting source can be natural light or artificial lighting source. When the lighting source 12 is an artificial lighting source, since it is arranged in a non-vacuum environment outside the vacuum environment 100, the lighting source can be placed arbitrarily, as long as the function of illuminating the device to be processed can be realized, and the visual recognition and positioning camera can be Identifying the light emitted by the lighting source and identifying and locating the device to be processed under the lighting environment realized by the lighting source. This embodiment is especially suitable for...

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Abstract

The invention provides a visual sense identification positioning system used for the vacuum environment, comprising a visual positioning identification device for identifying and positioning a device to be processed; the visual identification positioning device is placed in a sealed cavity body for normal operation; the positioning surface of the sealed cavity which faces the device to be processed is provided with a light transmission part allowing the visual identification positioning device to identify and position the device to be processed; and the sealed cavity is internally provided with a cooling device. In the invention, the visual identification positioning device is placed in the sealed cavity where the atmosphere and the pressure are normal, and an independent cooling device is configured for the sealed cavity, which enables the visual sense identification positioning system to finish the static or the dynamic visual identification and high accuracy positioning under the vacuum environment, helps the device to better finish the movements of grabbing and welding, dramatically improves the production efficiency and particularly adapts to the vacuum, high accuracy and high automation devices for packaging, welding, testing, etc.

Description

technical field [0001] The invention relates to a visual recognition positioning system, in particular to a visual recognition positioning system used in a vacuum environment. Background technique [0002] MEMS vacuum packaging is a packaging technology that uses a sealed cavity to provide a highly airtight vacuum environment. Vacuum packaging enables the movable parts of MEMS devices to work in a vacuum environment, ensuring the quality factors of MEMS devices. MEMS packaging occupies a very important position in the production process of MEMS devices, and is a key step for the practical application of devices. [0003] The vacuum packaging of MEMS devices requires the use of high-vacuum packaging equipment for welding, testing and other processes, and a high-vacuum environment must also be established inside the packaging equipment. In the prior art, in order to realize the automation of high-vacuum packaging equipment, mechanical or tool positioning is generally used to ...

Claims

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Application Information

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IPC IPC(8): G01B11/00
CPCG01B11/00
Inventor 赵照
Owner XINFOO SENSOR TECH CO LTD