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Roller device for vacuum deposition arrangement, vacuum deposition arrangement with roller and method for operating a roller

A vacuum deposition and vacuum technology, applied in the direction of surface coating liquid devices, coatings, gaseous chemical plating, etc., can solve problems such as high friction

Inactive Publication Date: 2016-06-08
APPLIED MATERIALS INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The disadvantage of this type of roller is that it requires a vacuum tight seal for the rotating feedthrough for passing the heat transfer medium through the pipes
This leads to high friction problems

Method used

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  • Roller device for vacuum deposition arrangement, vacuum deposition arrangement with roller and method for operating a roller
  • Roller device for vacuum deposition arrangement, vacuum deposition arrangement with roller and method for operating a roller
  • Roller device for vacuum deposition arrangement, vacuum deposition arrangement with roller and method for operating a roller

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Embodiment Construction

[0023] Reference will now be made in detail to various embodiments of the invention, one or more examples of which are illustrated in the drawings. In the following description of the drawings, the same reference numerals denote the same components. In general, only the differences of the various embodiments are described. Each example is provided by way of explanation of the invention, not intended to limit the invention. Furthermore, features illustrated or described as part of one embodiment can be used on or in conjunction with other embodiments to yield a further embodiment. The description is intended to cover such modifications and variations.

[0024] Furthermore, in the following description a roller device may be understood as a device providing a surface that a substrate (or a part of a substrate) can contact during its presence in a deposition arrangement such as a deposition apparatus or a deposition chamber. At least a portion of the roller arrangement may com...

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PUM

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Abstract

A deposition arrangement (100; 600) for depositing a material on a substrate (110; 640) is described. The deposition arrangement includes a vacuum chamber (120); a roller device (200; 300; 400; 500; 604) within the vacuum chamber (120); and an electrical heating device (61; 220; 320; 420; 520) within the roller device (200; 300; 400; 500; 604), wherein the heating device comprises a first end (250) and a second end (260), and wherein the heating device is held at the first end and at the second end. Also, a method for heating a substrate in a vacuum deposition arrangement is described.

Description

technical field [0001] Embodiments of the present invention relate to a vacuum deposition apparatus having a roller arrangement. Embodiments of the present invention particularly relate to a vacuum deposition apparatus having a roller arrangement for coating a flexible substrate, and more particularly to a guide roller arrangement for guiding a flexible substrate during a vacuum deposition process. Embodiments of the invention also relate to a method for operating a roll arrangement in a vacuum deposition arrangement. Background technique [0002] The handling of flexible substrates such as plastic films or foils is in high demand in the packaging industry, the semiconductor industry and other industries. Processing may consist of the steps of coating the flexible substrate with desired materials such as metals (especially aluminum), semiconductors, and dielectric materials, etching, and other processing steps on the substrate for the desired application. Systems that perf...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C16/46C23C16/48C23C16/54
CPCC23C16/46C23C16/481C23C16/54B05C1/003B05D1/60H01L21/67739
Inventor A·索尔J·亨里奇T·德皮施D·瓦格纳
Owner APPLIED MATERIALS INC