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Monolithic integration device for tera-hertz time domain spectral system and preparation method

A technology of terahertz time-domain and spectral systems, which is applied in the field of monolithic integrated devices and preparations of terahertz time-domain spectroscopy systems, can solve problems such as space occupation, achieve the effects of reducing usage, convenient operation, and improving spectral resolution

Inactive Publication Date: 2016-10-12
CAPITAL NORMAL UNIVERSITY
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Problems solved by technology

[0009] In view of this, the present invention provides a monolithic integrated device for the terahertz time-domain spectroscopy system, which solves the space occupation problem of the traditional terahertz time-domain spectroscopy system; The collimation adjustment makes the sample measurement steps more concise

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  • Monolithic integration device for tera-hertz time domain spectral system and preparation method
  • Monolithic integration device for tera-hertz time domain spectral system and preparation method
  • Monolithic integration device for tera-hertz time domain spectral system and preparation method

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[0038] The present invention will be described in detail below with reference to the accompanying drawings and examples.

[0039] A monolithic integrated device for a terahertz time-domain spectroscopy system of the present invention, as shown in Figure 1, includes: a substrate, a photoconductive antenna prepared on the upper surface of the substrate for generating terahertz, as a pumping region , also includes preparing a photoconductive antenna for detecting terahertz on the other side of the upper surface of the substrate as the detection area; wherein, the pumping area and the detection area are connected by a microstrip line 4 for transmitting terahertz pulses, and the micro The sample 1 to be measured is set on the strip line 4 . The base is composed of a silicon substrate 9, an Au metal back plate 8, a polymer material BCB dielectric 7 and a polyimide 5 from bottom to top; the photoconductive antenna is composed of a metal electrode 2 and a low-temperature GaAs 3 as a s...

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Abstract

The invention discloses a monolithic integration device for a tera-hertz time domain spectral system and a preparation method. Through a stripping transfer and bonding technique of a low-temperature GaAs film, the production and the reception of tera-hertz are integrated into the same substrate, so that the monolithic integration device has the characteristics of being small in size, light in weight, low in cost and convenient to operate. The device structurally comprises a photoconduction antenna, a metal waveguide and a base, wherein the photoconduction antenna consists of metal electrodes and a low-temperature GaAs film; the metal waveguide is a microstrip line for transmitting the tera-hertz; the base consists of BCB media, an Au metal backing plate and a silicon base. Through the adoption of the monolithic integration device and the preparation method thereof disclosed by the invention, the problem of high space occupation of a conventional tera-hertz time domain spectral system is solved, and all parts of the system are integrated to the same substrate; besides, in the measuring process, only a few number of samples are needed to obtain corresponding information; on the other hand, tera-hertz collimation adjustment before sample measurement is reduced, so that sample measuring steps are more succinct.

Description

technical field [0001] The invention belongs to the technical field of terahertz, and in particular relates to a monolithic integrated device and a preparation method for a terahertz time-domain spectroscopy system. Background technique [0002] Terahertz wave refers to electromagnetic waves with a frequency between 0.1 and 10 THz (wavelength between 30 and 3000 μm), and its wave band is between microwave and infrared. The rapid development of ultrafast laser technology and semiconductor material science and technology in the past decade has provided a stable and reliable excitation source for the generation of terahertz pulses, and promoted the wide application of terahertz in spectroscopy and imaging technology. [0003] The terahertz time-domain spectroscopy system uses femtosecond lasers to excite photoconductive materials or electro-optical materials. After the emitted terahertz pulses are focused, they are irradiated on the sample, and the terahertz pulses are modulate...

Claims

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Application Information

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IPC IPC(8): G01N21/3581
CPCG01N21/3581
Inventor 张聪苏波崔海林何敬锁范宁张盛博张存林
Owner CAPITAL NORMAL UNIVERSITY
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