Combined zeroing high precision laser large working distance autocollimation device and method

Abstract

The invention belongs to the technical field of precision measurement and the field of optical engineering, and particularly relates to a combined zeroing high-precision laser large-working-distance auto-collimation device and method. The device consists of a light source, a collimating mirror, a reflecting mirror, and a feedback imaging system. According to the method, a reflecting light beam returns to an image surface center of the feedback imaging system by adjusting the reflecting mirror, and the angle change of the surface of a measured object by using an angle deflection measurement device on the reflecting mirror. Due to addition of the reflecting mirror to a traditional auto-collimation angle measurement system, the problem that the measured object cannot be measured due to deflection of reflecting light of the measured object from the measurement system can be avoided, thereby having the advantages of expansion of an auto-collimation working range under the same working distance or increase of the working distance under the same auto-collimation working range. Besides, due to specific design of the collimating mirror, the feedback imaging system, the reflecting mirror and the like, the combined zeroing high-precision laser large-working-distance auto-collimation device has the technical advantages of simple structure, low manufacturing cost, ability to monitor the stability of a measurement environment, and quick measurement.

Description

technical field [0001] The invention belongs to the field of precision measurement technology and the field of optical engineering, in particular to a self-collimation device and method for combined zeroing and high-precision laser large working distance. Background technique [0002] In the fields of precision measurement technology, optical engineering, cutting-edge scientific experiments and high-end precision equipment manufacturing, there is an urgent need for large working range and high-precision laser self-collimation technology at a large working distance. It supports the development of technology and equipment in the above fields. [0003] In the field of precision measurement technology and instruments, the combination of laser autocollimator and circular grating can measure any line angle; the combination of laser autocollimation technology and polyhedral prism can measure surface angle and circular indexing; the maximum working distance From a few meters to hun...

AI Technical Summary

Problems solved by technology

[0008] First, the range of the angle between the normal of the mirror surface of the measured object 5 and the optical axis of the laser autocollimator should not be too large, otherwise the reflected beam will deviate from the entrance pupil of the laser autocollimator optical system, resulting in failure to achieve self-collimation Straight and micro angle measurement;

[0009] Second, the distance between the mirror surface of the measured object 5 and the entrance pupil of the laser autocollimator should not be too far away, otherwise as long as the reflected optical axis deviates from the optical axis of the autocollimator by a small angle, the reflected beam will deviate from the optical system of the laser autocollimator The entrance pupil, which leads to the inability to achieve self-collimation and micro-angle measurement

[0010] The above two problems limit the use of traditional autocollimation instruments to small angles and small working distances.

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