Light momentum-excited nano beam microparticle mass measuring device and method

Abstract

The invention provides a light momentum-excited nano beam microparticle mass measuring device which comprises a sine-like light momentum excitation generation device and a micro mass detection device; monochromatic lights of an upper laser and a lower laser respectively irradiate light transmission holes of an upper disc and a lower disc; a driving motor drives a shaft to rotate, sine-like distribution light momentum excitation can be produced, and then a nano beam is excited to vibrate; the nano beam produces forced vibration under the action of alternating light momentum excitation, and resistance value of a resistor layer pasted at the root of the nano beam is changed; the signal can be output by utilizing a Wheatstone bridge circuit; and after amplification is carried out by virtue of a signal amplifier, spectral analysis can be carried out, vibration information images in a time domain and a frequency domain are obtained, and vibration parameters such as vibration amplitude and vibration frequency are obtained. Rotating speeds of the light momentum excitation generation device and the driving motor are changed, and light momentum excitation frequency is changed along with the rotating speeds; and when the nano beam resonates, an output current signal value is maximum, the resonant vibration frequency of the nano beam can be detected by measuring the voltage change peak, added mass adhered at the tail end of the nano beam is obtained by calculating, and thus the aim of measuring the mass of a nano-micro particle is achieved.

Description

technical field [0001] The patent of the present invention relates to a nano-micro mass detection device, in particular to a nano-micro mass measurement device, which belongs to the field of nano-micro mass detection. Background technique [0002] For mechanical resonators, nanomicrocantilevers are important devices for detecting weak force signals. In order to achieve higher mechanical sensitivity, it is necessary to use smaller micro-oscillators. However, how to drive and detect the vibration of the micro-resonator has become one of the problems that restricts the improvement of the accuracy of measuring the mass of nano-particles. Based on the basic principles of quantum mechanics, in the process of driving and measuring, the driving and measuring equipment will cause disturbance and damage to the measured object, introduce unnecessary noise, and reduce the accuracy of measurement. In terms of vibration signal extraction of nano-micro resonators, the method of detecting ...

AI Technical Summary

Problems solved by technology

In order to achieve higher mechanical sensitivity, it is necessary to use smaller micro-vibrators. However, how to drive and detect the vibration of the micro-resonator has become one of the problems that restricts the improvement of the accuracy of measuring the mass of nano-particles.

Based on the basic principles of quantum mechanics, in the process of driving and measuring, the driving and measuring equipment will cause disturbance and damage to the measured object, introduce unnecessary noise, and reduce the accuracy of measurement

In terms of vibration signal extraction of nano-micro resonators, the method of detecting displacement signals is usually used to convert displacement signals into optical, electrical, magnetic and other signals. By measuring these signals, high-sensitivity displacement measurement can be realized. The size and geometry of mechanical vibrators have strict requirements, and it is difficult to apply to the measurement of nanometer and sub-nanometer scale mechanical vibrators, potentially restricting the measurement of high-precision quality

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