Apparatus and method for mass measurement of nanobeams and microparticles excited by light momentum

Abstract

The invention provides a light momentum excitation nanobeam quality measurement device, including a sinusoidal light momentum excitation generating device and a micro-mass detection device, the monochromatic light of the upper laser and the lower laser illuminates the light holes of the upper disc and the lower disc respectively, Drive the motor to drive the shaft to rotate, which can generate light momentum excitation similar to sinusoidal distribution, and stimulate the nanobeam to vibrate. The Wheatstone bridge circuit can output the signal, and after being amplified by the signal amplifier, the spectrum analysis can be performed to obtain vibration information images in the time domain and frequency domain of vibration, and vibration parameters such as vibration amplitude and vibration frequency. Changing the rotational speed of the drive motor of the photomomentum excitation generating device, the photomomentum excitation frequency changes accordingly. When the nanobeam resonates, the output current signal value is the largest, and the resonance vibration frequency of the nanobeam can be detected by measuring the peak value of the voltage change. Through calculation, the viscosity at the end of the nanobeam is obtained. The size of the attached additional mass achieves the purpose of measuring the mass of nanoparticles.

Description

technical field [0001] The patent of the present invention relates to a nano-micro mass detection device, in particular to a nano-micro mass measurement device, which belongs to the field of nano-micro mass detection. Background technique [0002] For mechanical resonators, nanomicrocantilevers are important devices for detecting weak force signals. In order to achieve higher mechanical sensitivity, it is necessary to use smaller micro-oscillators. However, how to drive and detect the vibration of the micro-resonator has become one of the problems that restricts the improvement of the accuracy of measuring the mass of nano-particles. Based on the basic principles of quantum mechanics, in the process of driving and measuring, the driving and measuring equipment will cause disturbance and damage to the measured object, introduce unnecessary noise, and reduce the accuracy of measurement. In terms of vibration signal extraction of nano-micro resonators, the method of detecting ...

AI Technical Summary

Problems solved by technology

In order to achieve higher mechanical sensitivity, it is necessary to use smaller micro-vibrators. However, how to drive and detect the vibration of the micro-resonator has become one of the problems that restricts the improvement of the accuracy of measuring the mass of nano-particles.

Based on the basic principles of quantum mechanics, in the process of driving and measuring, the driving and measuring equipment will cause disturbance and damage to the measured object, introduce unnecessary noise, and reduce the accuracy of measurement

In terms of vibration signal extraction of nano-micro resonators, the method of detecting displacement signals is usually used to convert displacement signals into optical, electrical, magnetic and other signals. By measuring these signals, high-sensitivity displacement measurement can be realized. The size and geometry of mechanical vibrators have strict requirements, and it is difficult to apply to the measurement of nanometer and sub-nanometer scale mechanical vibrators, potentially restricting the measurement of high-precision quality

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