Micro-beam ultraharmonic and synchronous resonance signal frequency doubling tuning and amplifying device
A resonant signal and ultra-harmonic technology, applied in measuring devices, measuring ultrasonic/sonic/infrasonic waves, and utilizing vibrating fluids, etc., can solve the problems of large volume, difficult filtering, low signal-to-noise ratio, etc., and achieve high measurement sensitivity, Measure the effect of few interference factors and simple structure
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[0014] Below in conjunction with accompanying drawing, make further detailed description:
[0015] The main structure of this embodiment includes two parts: an electrostatic excitation vibration device of a cantilever beam, and a superharmonic synchronous resonance frequency multiplication signal tuning device. The electrostatic excitation vibration device is composed of a low-frequency microbeam 1, a low-frequency piezoelectric control block 2, a fixed end 3, an electrostatic driving electrode 4, a base 5, a DC voltage power supply 6, a signal source 7 and wires. The left end of the low-frequency microbeam 1 is fixedly connected to the fixed end 3, the right end is fixedly connected to the low-frequency piezoelectric control block 2, and the low-frequency piezoelectric control block 2 is fixedly connected to the fixed end 3; the electrostatic drive electrode 4 is located at the bottom of the low-frequency microbeam 1 Directly below, fixed on the base 5, the length is shorter ...
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