A nano-micro-mass measurement device based on FET gate displacement sensitivity

Abstract

Aiming at the current situation that it is difficult to measure the quality of nano and micro particles, the invention proposes a device for measuring the quality of nano and micro particles. The nano-micro quality measurement device based on FET gate displacement sensitivity includes two parts: a nano-beam electrostatic excitation vibration device and a vibration signal detection device. The nanobeams are forced to vibrate under the excitation of AC signals; when the nanobeams vibrate up and down, the distance between the field effect transistor channel and the field effect transistor channel changes periodically, so that the source and drain of the field effect transistor generate a period synchronous with the vibration signal A periodically changing current flows through the signal sampling resistor to generate a periodically changing voltage, and the voltage signal is collected by a signal detector to detect the vibration frequency of the nanobeam. FET grid displacement sensitive vibration test is a non-contact driving method, which reduces the impact of the sensor on the measured object due to contact, and improves the accuracy and resolution of nano- and micro-mass measurement. The invention can be widely used in the field of detection of bacteria and viruses, detection of air pollutants and other fields of nanoparticle detection, and can even be used for single molecule or atomic mass detection.

Description

technical field [0001] The patent of the present invention is a nano-micro quality measurement device based on FET grid displacement sensitivity, especially a nano-micro quality measurement device, which belongs to the field of nano-micro quality detection. Background technique [0002] For mechanical resonators, nanomicrocantilevers are important devices for detecting weak force signals. In order to achieve higher mechanical sensitivity, it is necessary to use smaller micro-oscillators. However, how to measure the vibration of micro-harmonic oscillators has become one of the problems that restricts the improvement of the accuracy of measuring the mass of nano-particles. In terms of vibration signal extraction of nano-micro resonators, the method of detecting displacement signals is usually used to convert displacement signals into optical, electrical, magnetic and other signals. By measuring these signals, high-sensitivity displacement measurement can be realized. The size...

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Problems solved by technology

In order to achieve higher mechanical sensitivity, it is necessary to use a smaller micro-oscillator. However, how to measure the vibration of a micro-harmonic oscillator has become one of the problems that restrict the improvement of the accuracy of measuring the mass of nano-particles.

In terms of vibration signal extraction of nano-micro resonators, the method of detecting displacement signals is usually used to convert displacement signals into optical, electrical, magnetic and other signals. By measuring these signals, high-sensitivity displacement measurement can be realized. The size and geometry of mechanical vibrators have strict requirements, and it is difficult to apply to the measurement of nanometer and sub-nanometer scale mechanical vibrators, potentially restricting the measurement of high-precision quality

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