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Sensor for detecting pressure of fluid medium

A fluid medium and sensor technology, applied in the direction of measuring fluid pressure, measuring fluid pressure through electromagnetic components, and fluid pressure measurement by changing ohmic resistance

Inactive Publication Date: 2017-06-30
ROBERT BOSCH GMBH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Additional costs for production arise in the sensor element with the cover mounted thereon

Method used

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  • Sensor for detecting pressure of fluid medium

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Experimental program
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Embodiment Construction

[0019] figure 1 A longitudinal cross-sectional view of the sensor 10 according to the present invention for sensing the pressure of a fluid medium is shown. The sensor 10 may, for example, be configured to sense the pressure of fuel in the fuel line of the internal combustion engine or the pressure of exhaust gas in the exhaust gas flow of the internal combustion engine. Only a part of the components of the sensor 10 are shown here. Other components such as the housing, the screw, the housing base, and the connecting plug are not shown.

[0020] The sensor 10 includes a sensor element 12. The sensor element 12 is a silicon chip. The sensor 12 has a front surface 14 and a back surface 16. A recess 18 is formed in the front surface 14. The section of the sensor 12 above the recess 18 with a reduced material thickness forms a deformable membrane 20. A plurality of piezoresistive elements (not shown in detail) in the form of a measuring bridge, for example in the form of a Whea...

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Abstract

A sensor 10 for detecting a pressure of a fluid medium is provided. The sensor includes a sensor element 12 for detecting the pressure of the fluid medium, a supply duct 24 for supplying the fluid medium to the sensor element 12 and a control and / or evaluation circuit26 for processing signals of the sensor element 12. The control and / or evaluation circuit26 is situated on the sensor element 12.

Description

Technical field [0001] The invention relates to a sensor for sensing the pressure of a fluid medium. Background technique [0002] In different fields of technology, such as natural sciences and medical technology, one or more characteristics of fluid media must be sensed. One of these characteristics is the pressure of the fluid medium, that is, the pressure of the gas and / or liquid. [0003] An important example is sensing the pressure of fluid media in the automotive field, but the present invention is not limited to this invention. Such pressure sensors are known, for example, by Konrad Reif (Editor): Sensors in Automobiles (Sensoren im Kraftfahrzeug), first edition 2010, pages 134 to 136. [0004] Pressure sensors for automotive applications are based on so-called silicon sensing technology, that is, the application of a silicon chip as a sensor element with a deformable diaphragm, where the degree of deformation of the diaphragm is a measurement standard for pressure. Basica...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01L9/00G01L9/06
CPCG01L9/0055G01L9/06H01L2224/48091G01L19/0061G01L19/148G01L19/0038H01L2924/00014G01L9/0052G01L19/14
Inventor F·吕特O·施托尔
Owner ROBERT BOSCH GMBH