Visible blind ultraviolet light detector unit and array

A detector array and ultraviolet light technology, which is applied in the direction of electrical components, electric solid-state devices, semiconductor devices, etc., can solve the problems of limited blind ultraviolet light detectors and sensitivity that cannot meet practical requirements.

Active Publication Date: 2017-08-01
INST OF PHYSICS - CHINESE ACAD OF SCI
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  • Abstract
  • Description
  • Claims
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AI Technical Summary

Problems solved by technology

But so far, the visible-blind ultraviolet light detector is still very limited, and the sensitivity can not meet the practical requirements, and the visible-blind ultraviolet light array and area array detector have not been reported yet.

Method used

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  • Visible blind ultraviolet light detector unit and array
  • Visible blind ultraviolet light detector unit and array
  • Visible blind ultraviolet light detector unit and array

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Embodiment Construction

[0038] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below through specific embodiments in conjunction with the accompanying drawings.

[0039] figure 1 It is a three-dimensional schematic diagram of the visible-blind ultraviolet light detector unit 10 according to the first embodiment of the present invention, figure 2 is a top view of the visible-blind ultraviolet light detector unit 10, image 3 It is a sectional view of the visible-blind ultraviolet light detector unit 10 along line A-A, and its cross section is parallel to one side of the visible-blind ultraviolet light detector unit 10 . Such as Figure 1-3 As shown, the visible-blind ultraviolet photodetector unit 10 includes strontium titanate (SrTiO 3 ) substrate 11, and set in SrTiO 3 The electrode 12 and the electrode 13 are on the same side of the substrate 11 . Wherein, the electrode 12 has a circular...

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PUM

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Abstract

The invention provides a visible blind ultraviolet light detector unit and an array. The visible blind ultraviolet light detector unit comprises an oxide substrate, a first electrode and a second electrode, wherein the band gap of the oxide substrate is 3-5 electron volt; the first electrode and the second electrode are arranged on the surface of the oxide substrate; and the second electrode is provided with a through hole. The electrode material of the visible blind ultraviolet light detector unit can be metal, graphite or other conductive material. The visible blind ultraviolet light detector array comprises multiple visible blind ultraviolet light detector units, and the second electrodes of the multiple visible blind ultraviolet light detector units are electrically connected to form a net-like structure. Due to the visible blind ultraviolet light detector array, scanning detection, imaging and tracking on a target in visible and infrared light environments can be realized.

Description

technical field [0001] The invention relates to the field of ultraviolet light detectors, in particular to a visible-blind ultraviolet light detector. Background technique [0002] Since the visible-blind ultraviolet light detector is not interfered by visible light and infrared light, it can detect ultraviolet light in the environment of visible light and infrared light, so it has very important and extensive applications in the fields of scientific research, military and national defense. [0003] The inventors of this patent have reported visible-blind ultraviolet photodetectors with fast-response perovskite oxide single crystals with rise times of nanoseconds and picoseconds, for example Document 1: J.Xing et al., Optics Letters, Vol.32, No. .17,2526(2007); Document 2: Kun Zhao et al., Appl.Phys.Lett., 89,173507(2006); Chinese Patent Application No. 201010107349.7 and Chinese Patent Application No. 200510082702.X disclose several ultraviolet light detectors . But so fa...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L31/0224H01L31/101H01L27/144
CPCH01L27/1443H01L31/022408H01L31/101
Inventor 吕惠宾葛琛郭海中金奎娟杨国桢
Owner INST OF PHYSICS - CHINESE ACAD OF SCI
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