Lorentz force motor direct drive inductance sensor calibration device

An inductive sensor, calibration device technology, applied in the direction of using electrical devices, measuring devices, instruments, etc., can solve the problems of low accuracy, small calibration stroke, small calibration stroke, etc., to ensure the calibration accuracy, improve the calibration stroke, and eliminate errors. Effect

Inactive Publication Date: 2019-01-11
HARBIN INST OF TECH
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Problems solved by technology

The problem with this device is that it is only limited to the calibration of the flat capacitive displacement sensor, and the calibration stroke is small
The problem with this device is that it does not take into account the stroke and accuracy indicators, the accuracy is low, and it is impossible to achieve high-precision displacement sensor calibration
The calibration stroke of this device is small, and it is impossible to calibrate the displacement sensor with large stroke and high precision.

Method used

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  • Lorentz force motor direct drive inductance sensor calibration device
  • Lorentz force motor direct drive inductance sensor calibration device
  • Lorentz force motor direct drive inductance sensor calibration device

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Embodiment Construction

[0020] Below in conjunction with accompanying drawing, the present invention is described in further detail:

[0021] A Lorentz force motor direct-driven inductance sensor calibration device, the method and device are as follows: the whole device is mainly divided into three parts: a displacement reference instrument, a displacement transmission mechanism and a displacement sensor to be calibrated. The whole device is placed on a vibration isolation platform and placed in a constant temperature environment. The calibrated displacement sensor adopts the inductive displacement sensor 3, and the inductive displacement sensor 3 is clamped and fixed by the sensor clamping arm 2, and the position of the inductive displacement sensor 3 is adjusted to ensure that the movement axis of the probe 3a of the inductive displacement sensor 3 is in line with the dual-frequency laser The optical axes of the measuring beam 7 a of the interferometer 7 are collinear, the sensor support 1 is insta...

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Abstract

The invention discloses a Lorentz force motor direct drive inductive sensor calibration method and device, and belongs to the technical field of precision measurement. The calibration method and device take a dual-frequency laser interferometer as a motion reference, a voice coil motor as a macro motion drive element, an air-floating guide rail as a macro motion guide element, and capacitive sensors and the dual-frequency laser interferometer as macro motion feedback elements for macro motion coarse positioning; and adopt a piezoelectric ceramic displacement stage for micro motion positioning to compensate for a macro motion positioning error. The four capacitive sensors are used to compensate the pitch and yaw errors of a macro motion positioning platform. According to the invention, the contradiction between the travel and precision of the calibration device of the displacement sensor can be effectively solved, and the dynamic and static calibration of the large-travel and high-precision inductive displacement sensor is realized.

Description

technical field [0001] The invention belongs to the technical field of precision measurement, and mainly relates to a Lorentz force motor direct-drive inductance sensor calibration device. Background technique [0002] At present, my country's large-scale high-speed rotary equipment does not have ultra-precision measurement methods, assembly accuracy cannot be guaranteed, assembly efficiency is low, and engine vibration and noise are all major problems that restrict the development of my country's military industry and national economy. Large-scale high-speed rotary equipment mainly refers to various large-scale high-end gas turbine engines, mainly including aero engines, marine gas turbines and high-performance power station gas turbines. At present, the aero-engine industry has become the military industry of the world's aviation power and the pillar industry of the national economy. Under the premise of pursuing high performance, aero-engines must also pursue high qualit...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B7/02
CPCG01B7/02
Inventor 孙传智谭久彬王雷赵勃
Owner HARBIN INST OF TECH
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