Dual air-float guide rail oriented inductive sensor calibration method and device

A technology of inductive sensors and air-floating guide rails, applied in the direction of electric devices, measuring devices, instruments, etc., can solve the problems of small calibration stroke, low precision, and small calibration stroke, so as to improve the calibration stroke, ensure calibration accuracy, and eliminate errors Effect

Inactive Publication Date: 2017-11-21
HARBIN INST OF TECH
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Problems solved by technology

The problem with this device is that it is only limited to the calibration of the flat capacitive displacement sensor, and the calibration stroke is small
The problem with this device is that it does not take into account the stroke and accuracy indicators, the accuracy is low, and it is impossible to achieve high-precision displacement sensor calibration
The calibration stroke of this device is small, and it is impossible to calibrate the displacement sensor with large stroke and high precision.

Method used

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  • Dual air-float guide rail oriented inductive sensor calibration method and device
  • Dual air-float guide rail oriented inductive sensor calibration method and device
  • Dual air-float guide rail oriented inductive sensor calibration method and device

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Embodiment Construction

[0021] Below in conjunction with accompanying drawing, the present invention is described in further detail:

[0022] A method and device for calibrating an inductance sensor guided by double air-floating guide rails. The method and device are as follows: the whole device is mainly divided into three parts: a displacement sensor to be calibrated, a displacement transmission mechanism and a displacement reference instrument. The whole device is placed on a vibration isolation platform and placed in a constant temperature environment. The calibrated displacement sensor adopts an inductive displacement sensor 6, and the inductive displacement sensor 6 is clamped and fixed by the sensor clamping arm 5, and the position of the inductive displacement sensor 6 is adjusted to ensure that the movement axis of the probe 6a of the inductive displacement sensor 6 is in line with the dual-frequency laser The optical axes of the measuring beam 10 a of the interferometer 10 are collinear, th...

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Abstract

The invention discloses a dual air-float guide rail oriented inductive sensor calibration method and device, and belongs to the technical field of precision measurement. The calibration method and device take a dual-frequency laser interferometer as a motion reference, a linear voice coil motor as a driving element, an air-float guide rail as a guide element, and a linear grating scale as a feedback element for the large travel and fine positioning. Four capacitive displacement sensors are used to compensate the pitch and yaw errors of a displacement transfer mechanism. According to the invention, the contradiction between the travel and precision of the displacement sensor calibration device can be effectively, and the dynamic and static calibration of large-travel and high-precision inductive displacement sensors can be realized.

Description

technical field [0001] The invention belongs to the technical field of precision measurement, and mainly relates to a method and device for calibrating an inductance sensor guided by double air-floating guide rails. Background technique [0002] At present, my country's large-scale high-speed rotary equipment does not have ultra-precision measurement methods, assembly accuracy cannot be guaranteed, assembly efficiency is low, and engine vibration and noise are all major problems that restrict the development of my country's military industry and national economy. Large-scale high-speed rotary equipment mainly refers to various large-scale high-end gas turbine engines, mainly including aero engines, marine gas turbines and high-performance power station gas turbines. At present, the aero-engine industry has become the military industry of the world's aviation power and the pillar industry of the national economy. Under the premise of pursuing high performance, aero-engines m...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B7/02
CPCG01B7/02
Inventor 赵勃王雷谭久彬孙传智
Owner HARBIN INST OF TECH
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