Master-slave structure inductance sensor calibration device driven by ultrasonic motor

A technology of ultrasonic motors and calibration devices, which is applied in the direction of adopting electrical devices, measuring devices, instruments, etc., can solve the problems of low precision, small calibration stroke, and small calibration stroke, so as to ensure calibration accuracy, improve calibration stroke, and eliminate errors. Effect

Inactive Publication Date: 2019-07-16
HARBIN INST OF TECH
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Problems solved by technology

The problem with this device is that it is only limited to the calibration of the flat capacitive displacement sensor, and the calibration stroke is small
The problem with this device is that it does not take into account the stroke and accuracy indicators, the accuracy is low, and it is impossible to achieve high-precision displacement sensor calibration
The calibration stroke of this device is small, and it is impossible to calibrate the displacement sensor with large stroke and high precision.

Method used

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  • Master-slave structure inductance sensor calibration device driven by ultrasonic motor
  • Master-slave structure inductance sensor calibration device driven by ultrasonic motor
  • Master-slave structure inductance sensor calibration device driven by ultrasonic motor

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Embodiment Construction

[0021] Below in conjunction with accompanying drawing, the present invention is described in further detail:

[0022] An ultrasonic motor drives a master-slave structure inductance sensor calibration device. The device is: the whole device is mainly divided into three parts: a displacement sensor to be calibrated, a displacement transmission mechanism and a displacement reference instrument. The whole device is placed on a vibration isolation platform and placed in a constant temperature environment. The calibrated displacement sensor adopts the inductive displacement sensor 3, and the inductive displacement sensor 3 is clamped and fixed by the sensor clamping arm 2, and the position of the inductive displacement sensor 3 is adjusted to ensure that the movement axis of the measuring needle 3a of the inductive displacement sensor 3 is in line with the three-axis laser The optical axis of the beam 2 14b of the interferometer 14 is collinear, the sensor support 1 is installed on ...

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Abstract

The invention discloses an ultrasonic motor driven master-slave structure inductance sensor calibration method and device, and belongs to the technical field of precision measurement. The calibration method and device take a three-axis laser interferometer as a motion reference and an ultrasonic motor as a driving component to drive an active double V-groove guide rail, the active double V-groove guide rail is connected with a driven air guide rail through a flexible hinge to drive the driven air guide rail to do linear motion, and a linear scale is used as a feedback element for large travel and fine positioning. The three-axis laser interferometer is used for compensation of the pitch and yaw error of the motion of a displacement transfer mechanism. According to the invention, the contradiction between the travel and precision of the displacement sensor calibration device can be effectively solved, and the dynamic and static calibration of the large travel and high precision inductance displacement sensor is realized.

Description

technical field [0001] The invention belongs to the technical field of precision measurement, and mainly relates to an ultrasonic motor-driven master-slave structure inductance sensor calibration device. Background technique [0002] At present, my country's large-scale high-speed rotary equipment does not have ultra-precision measurement methods, assembly accuracy cannot be guaranteed, assembly efficiency is low, and engine vibration and noise are all major problems that restrict the development of my country's military industry and national economy. Large-scale high-speed rotary equipment mainly refers to various large-scale high-end gas turbine engines, mainly including aero engines, marine gas turbines and high-performance power station gas turbines. At present, the aero-engine industry has become the military industry of the world's aviation power and the pillar industry of the national economy. Under the premise of pursuing high performance, aero-engines must also pur...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B7/02
CPCG01B7/02
Inventor 赵勃王雷谭久彬孙传智
Owner HARBIN INST OF TECH
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