Inductive sensor calibration method and device for three-axis laser interferometer measurement

Abstract

The invention discloses an inductive sensor calibration method and device for the three-axis laser interferometer measurement, and belongs to the technical field of precision measurement. The calibration method and device take a three-axis laser interferometer as a motion reference, a linear motor as a macro motion driving element, an air-floating guide rail as a macro motion guide element, and a linear grating scale as a macro motion feedback element for macro motion positioning; and adopt a piezoelectric ceramic displacement stage for micro motion positioning to compensate for a macro motion positioning error. The three-axis laser interferometer is used to compensate the pitch and yaw errors of the motion of a macro-micro positioning platform. According to the invention, the contradiction between the travel and precision of the displacement sensor calibration device can be effectively solved, and the dynamic and static calibration of the large-travel and high-precision inductive displacement sensor is realized.

Description

technical field [0001] The invention belongs to the technical field of precision measurement, and mainly relates to a method and device for calibrating an inductance sensor measured by a three-axis laser interferometer. Background technique [0002] At present, my country's large-scale high-speed rotary equipment does not have ultra-precision measurement methods, assembly accuracy cannot be guaranteed, assembly efficiency is low, and engine vibration and noise are all major problems that restrict the development of my country's military industry and national economy. Large-scale high-speed rotary equipment mainly refers to various large-scale high-end gas turbine engines, mainly including aero engines, marine gas turbines and high-performance power station gas turbines. At present, the aero-engine industry has become the military industry of the world's aviation power and the pillar industry of the national economy. Under the premise of pursuing high performance, aero-engin...

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Problems solved by technology

[0008] Aiming at the deficiencies in the above-mentioned existing technologies, a method and device for calibrating an inductance sensor measured by a three-optical axis laser interferometer are proposed to solve the contradiction between the stroke and accuracy of the existing displacement sensor calibration device and realize large stroke and high-precision inductance displacement Dynamic and static calibration of sensors

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