Method for driving object to move
A technology of object motion and motion, applied in the direction of electrostatic motor, generator/motor, electrostatic generator/motor, etc., to achieve the effect of improving accuracy
Inactive Publication Date: 2018-06-12
GALAXYCORE SHANGHAI
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Problems solved by technology
In the work of semiconductor devices, there are certain functions that need to control and drive semiconductor devices to move in one direction. In the prior art, electromagnetic control or MEMS is often used for control, and the control accuracy needs to be improved. In addition, the existing drive control methods need Larger mechanical devices are inconsistent with the development direction of higher electronic integration requirements. Therefore, how to provide a method for driving objects in the semiconductor field is one of the needs of the industry.
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[0034] The invention provides a method for driving an object to move, providing at least one elastic structure, a stator, and a mover; the elastic structure part is fixed on the stator; there is at least one electrode on the stator, and the electrode applies an electrostatic force to the elastic structure , by controlling the polarity and time of the voltage applied by the electrodes, when the electrostatic force reciprocates in the elastic structure, within a certain time interval, the positive work done is greater than the negative work, and the work done by the electrostatic force is accumulated as the elastic potential energy of the elastic structure and kinetic energy, the top of the elastic structure contacts the mover, and converts part of the elastic potential energy and kinetic energy of the elastic structure into the energy driving the mover, driving the mover to move in a certain direction.
[0035] The content of the present invention will be described below in conj...
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The invention provides a method for driving an object to move. At least an elastic structure, a stator and a mover are provided; the elastic structure is partially fixed on the stator, and the statorand the mover can provide electrostatic force for the elastic structure; the electrostatic force is exerted on the elastic structure, in a certain period of time, the electrostatic force does work onthe elastic structure, and mechanical energy is accumulated by the elastic structure; by controlling the strength, direction and time of the electrostatic force exerted on the elastic structure, partof the mechanical energy of the elastic structure is converted into energy for driving the mover to move in a designated direction; meanwhile, part of the electrostatic energy of the mover is converted into the force driving the mover to move in a designated direction through the elastic structure.
Description
technical field [0001] The invention relates to the field of semiconductors, in particular to a method for driving objects in the field of semiconductors. Background technique [0002] Semiconductors are the foundation of modern industry. With the advent of the information and digital age, the penetration rate of electronic products has reached a very high level. As the basic components of electronic products, semiconductors have played a pivotal role. In the work of semiconductor devices, there are certain functions that need to control and drive semiconductor devices to move in one direction. In the prior art, electromagnetic control or MEMS is often used for control, and the control accuracy needs to be improved. In addition, the existing drive control methods need Larger mechanical devices are inconsistent with the development direction of higher electronic integration requirements. Therefore, how to provide a method for driving objects in the semiconductor field is one ...
Claims
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IPC IPC(8): H02N1/00
CPCH02N1/002
Inventor 赵立新
Owner GALAXYCORE SHANGHAI