Biosensor device
A technology for biosensors and biomolecules, applied in measurement devices, instruments, scientific instruments, etc., can solve the problems of uneven coating, increased manufacturing complexity and cost of sensor device 2, and inaccurate measurement of sensor device 1.
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[0017] The following description will provide various embodiments of the invention. It should be understood that these examples are not intended to be limiting. Features of the present invention can be modified, substituted, combined, separated and designed to be applied in other embodiments.
[0018] image 3 A top view of a biosensor device 3 according to an embodiment of the present invention is shown. like image 3 As shown, the detection line 35 runs along a zigzag path in the interface region 40 of the biosensor device 3 .
[0019] In order to describe the details of the biosensor device 3, Figure 4 A perspective view showing the structure of the biosensor device of the present invention. in particular, Figure 4 show image 3 The profile at the A-A line segment. like Figure 4 As shown, the biosensor device 3 includes a substrate 31 , a field oxide layer 32 , a conductive layer 33 , an oxide layer 34 , a detection line 35 , a coating layer 36 , a wall layer 37...
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