The invention discloses a
CMOS compatible
biosensor based on a two-dimensional
semiconductor and a preparation method and application of the
CMOS compatible
biosensor, specifically, an aluminum
nitride layer compatible with a
CMOS process is deposited on a
silicon substrate, a two-dimensional
semiconductor layer is formed on the surface of the aluminum
nitride layer to serve as a sensing layer, and meanwhile a biological recognition element is fixed. The two-dimensional
semiconductor layer is used for being combined with target biomolecules to generate a
reaction product with
electron donating and receiving capability, so that the
reaction product is subjected to efficient charge transfer on the two-dimensional semiconductor layer, and the conductive detection layer can output sensitive and controllable
signal change; the
band gap characteristic and the
high surface area of the two-dimensional semiconductor are utilized, the aluminum
nitride and the
silicon substrate are combined for use to achieve CMOS compatibility of the biosensing device, and due to the fact that the two-dimensional semiconductor has the excellent optical absorption and emission characteristics, the biosensing device can also be expanded to optical biosensing, optical biosensing and the like.
Coupling detection of photoelectric signals and chemical or biological events is achieved, and the application range and multifunctionality are further expanded.