A method for regulating randomness of conductive paths of a conductive bridge memory
A conductive path and memory technology, applied in the field of memory, can solve problems such as complex process, high technology and operation requirements, unfavorable device promotion and use, etc., and achieve the effect of improving reliability and suppressing randomness
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[0019] The technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with specific embodiments of the present invention and with reference to the accompanying drawings.
[0020] The memory based on the conductive bridge has a general structure of an inert upper electrode / resistive function layer / a high thermal conductivity thin layer / active lower electrode.
[0021] In the general structure, the inert upper electrode is selected from Pt, and the resistive function layer is HfO 2 , the active lower electrode is Cu.
[0022] According to the conduction path regulating method provided by the present invention, the high thermal conductivity thin layer is selected from BN, and grown on the surface of the active lower electrode by magnetron sputtering.
[0023] Based on a general structure of an inert upper electrode / resistive variable function layer / high thermal conductivity thin layer / active lower electrode, the ...
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