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A method for regulating randomness of conductive paths of a conductive bridge memory

A conductive path and memory technology, applied in the field of memory, can solve problems such as complex process, high technology and operation requirements, unfavorable device promotion and use, etc., and achieve the effect of improving reliability and suppressing randomness

Inactive Publication Date: 2019-01-11
BEIHANG UNIV
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  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, this method has very high requirements on equipment, technology, and operation, and the process is relatively complicated, which is not conducive to the popularization and use of devices. Therefore, the present invention proposes a simple and easy-to-operate solution to realize the regulation of the conductive path

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  • A method for regulating randomness of conductive paths of a conductive bridge memory
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  • A method for regulating randomness of conductive paths of a conductive bridge memory

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Embodiment Construction

[0019] The technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with specific embodiments of the present invention and with reference to the accompanying drawings.

[0020] The memory based on the conductive bridge has a general structure of an inert upper electrode / resistive function layer / a high thermal conductivity thin layer / active lower electrode.

[0021] In the general structure, the inert upper electrode is selected from Pt, and the resistive function layer is HfO 2 , the active lower electrode is Cu.

[0022] According to the conduction path regulating method provided by the present invention, the high thermal conductivity thin layer is selected from BN, and grown on the surface of the active lower electrode by magnetron sputtering.

[0023] Based on a general structure of an inert upper electrode / resistive variable function layer / high thermal conductivity thin layer / active lower electrode, the ...

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Abstract

A method for regulating randomness of a conductive path of a conductive bridge memory is provided. The invention relates to a conductive bridge memory device of a general inert upper electrode / resistive functional layer / high thermal conductivity thin layer / active lower electrode structure. Forming a conductive path in the oxide and the high thermal conductivity thin layer by applying a positive voltage at the lower electrode; as that voltage is apply in the reverse direction, the conductive paths in the device without the high thermal conductivity layer rapidly and violently break when the temperature reaches the highest point, and the conductive paths in the device with the high thermal conductivity layer can not be completely broken when the voltage is applied in the reverse direction; as that positive voltage is apply to the lower electrode again, the conductive path in the device without adding the high thermal conductivity thin layer are randomly formed, and the conductive paths in the device with adding the high thermal conductivity thin layer are preferentially formed at the residual part again, thereby realizing the regulation of the conductive paths in the resistive variable memory based on the conductive bridges. The scheme provided by the invention is simple and easy to operate, and is convenient to realize the regulation of the conductive path of the conductive bridge memory.

Description

technical field [0001] The invention relates to the technical field of memory, in particular to a method for regulating the randomness of the conduction path of the conduction bridge memory. Background technique [0002] Because of the advantages of high storage density and low cost, silicon-based flash memory represents the most advanced non-volatile memory and occupies the largest share of the current memory market. However, flash memory suffers from the disadvantages of low operating speed, poor endurance, and high writing voltage and will reach their physical limits in the near future, so various new random access memory concepts have been proposed. Resistive memory has become one of the candidates for the next generation of non-volatile memory due to its advantages of simple structure, small size, fast operation speed, low power consumption, and good durability. Conductive bridge memory usually uses active metal electrodes (such as Ag, Cu, etc.) and inert metal electro...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L45/00
CPCH10N70/245H10N70/8613
Inventor 周健马尚孙志梅牧国会
Owner BEIHANG UNIV