A kind of manufacturing equipment of composite ceramic target

Abstract

The invention belongs to the technical field of preparation of ceramic targets, and specifically relates to a manufacturing equipment for a composite ceramic target, including a bottom plate, a placement area 1, a weighing system, and a liquid-phase glue-forming system and a liquid-phase dry glue system arranged on the bottom plate. A solid-phase mixing system, a solid-phase forming system, and a hot-press sintering system; one of the placement areas is set at one end of the bottom plate, and two weighing systems are respectively set on the liquid-phase gelling system and the solid-phase mixing system; The manufacturing equipment of the composite ceramic target of the present invention can prepare the composite ceramic target, can control the product quality in real time, the product grade is high, the production cost is reduced, multiple preparation processes are carried out at the same time, the degree of automation is high, the production cycle is short, and the output is high. It is beneficial to mass production of composite ceramic targets. The equipment of the present invention can prepare composite ceramic targets of the same type with different qualities on both sides or different types of composite ceramic targets with different qualities on both sides to meet the needs of different customers for different purposes.

Description

technical field [0001] The invention belongs to the technical field of preparation of ceramic targets, and in particular relates to a manufacturing equipment of a composite ceramic target. Background technique [0002] At present, the methods for preparing ceramic targets mainly include sol-gel method and solid phase method. Studies have shown that the quality of ceramic targets prepared by the sol-gel method is better than that of the solid-phase method, but the preparation process of the sol-gel method is more complicated and the cost is high, and it cannot be mass-produced. The preparation process is relatively simple and the cost is low, and it can be produced in batches. Therefore, some researchers combined the advantages and disadvantages of the sol-gel method and the solid-phase method to prepare ceramic powder and ceramic targets by using the two methods, and then mixed and pressed the ceramic powder and ceramic targets to obtain composite ceramic targets. . Howev...

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Problems solved by technology

However, there is currently no type of equipment that can complete the above operations at the same time. Multiple equipment and multiple processes are required to complete the production of composite targets. Not only the production efficiency is low, the output is not high, but also the quality of the product cannot be controlled in real time.

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