Piezoresistive three-dimensional vector hydrophone capable of suppressing vibration in X and Y directions
A technology of vibration suppression and three-dimensional vector, which is applied in the direction of instruments, measuring devices, radio wave measuring systems, etc., can solve the problems of low vibration sensitivity and vibration sensitivity height without anti-overload ability, so as to reduce vibration sensitivity, improve practical application and Promoting value and designing reasonable effects
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[0038] Specific embodiments of the present invention will be described in detail below in conjunction with the accompanying drawings.
[0039] For example Figure 1a and 1b As shown, the hydrophone includes a substrate and cilia 1, a central mass 3 and four rectangular beams 2 are etched in the middle of the substrate, and a cilium 1 is fixed in the center of the upper surface of the central mass 3; the four sides of the upper edge of the central mass 3 The rectangular beam 2 is integrally connected with the substrate frame 5 . In this structure, the substrate frame 5 is a rectangular frame, and the upper surface area of the central mass 3 is small. Since the cross-sectional area of the cilia 1 and the upper surface area of the central mass 3 are not much different, the hydrophone will generate an output when it is subjected to vibration. Signal. The output signal produced by the vibrations can interfere with or even drown out the signal produced by the acoustic wave m...
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