Piezoresistive three-dimensional vector hydrophone capable of suppressing vibration in X and Y directions

A technology of vibration suppression and three-dimensional vector, which is applied in the direction of instruments, measuring devices, radio wave measuring systems, etc., can solve the problems of low vibration sensitivity and vibration sensitivity height without anti-overload ability, so as to reduce vibration sensitivity, improve practical application and Promoting value and designing reasonable effects

Active Publication Date: 2019-04-05
ZHONGBEI UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Benefits of technology

This new type of sensor called 3-dimensionally oriented hydraulic pressure transducer (HTP) was developed after it had been released for use with low sensitive and overloaded equipment such as airplanes or missiles. However, this new technology also causes some problems when used on these devices because they are prone to be bent too much during operation caused by external forces like shocks or impacts. To solve this problem, an interference fit device made up of two pieces were added at one end of HPT' s suspension system. By adding another piece beforehand, the weight blocks attached to both ends could move slightly towards each other without causing any harm if subjected to strong force while receiving vibrations. Overall, this innovation improves the performance and reliability of the HP compared to previous designs.

Problems solved by technology

This patented technical problem addressed in this patents relates to improving the performance of pressure sensitive resistors (PZR) type 3D vectors that have been developed over time due to their smaller sizes, higher reliabilities, ease of manufacturing, and improved resistance against external forces such as impact force.

Method used

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  • Piezoresistive three-dimensional vector hydrophone capable of suppressing vibration in X and Y directions
  • Piezoresistive three-dimensional vector hydrophone capable of suppressing vibration in X and Y directions
  • Piezoresistive three-dimensional vector hydrophone capable of suppressing vibration in X and Y directions

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Embodiment Construction

[0038] Specific embodiments of the present invention will be described in detail below in conjunction with the accompanying drawings.

[0039] For example Figure 1a and 1b As shown, the hydrophone includes a substrate and cilia 1, a central mass 3 and four rectangular beams 2 are etched in the middle of the substrate, and a cilium 1 is fixed in the center of the upper surface of the central mass 3; the four sides of the upper edge of the central mass 3 The rectangular beam 2 is integrally connected with the substrate frame 5 . In this structure, the substrate frame 5 is a rectangular frame, and the upper surface area of ​​the central mass 3 is small. Since the cross-sectional area of ​​the cilia 1 and the upper surface area of ​​the central mass 3 are not much different, the hydrophone will generate an output when it is subjected to vibration. Signal. The output signal produced by the vibrations can interfere with or even drown out the signal produced by the acoustic wave m...

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Abstract

The invention discloses a three-dimensional vector hydrophone capable of suppressing vibration in X and Y directions. The three-dimensional vector hydrophone capable of suppressing vibration in the Xand Y directions comprises a substrate and cilia, wherein the substrate is composed of a central mass block, beams and a frame, and a piezoresistor is arranged at the tail end of each beam. Each edgeof the center mass block is suspended on the frame by every two beams, that is, the right edge of the center mass block, the upper edge of the center mass block, the left edge of the center mass blockand the lower edge of the center mass block are separately connected with the frame by the beams, and the center mass block is suspended on the frame. A certain gap is reserved among the mass block,the beams and the frame, and the overload resistance is achieved by limiting the displacement of the central mass block in the X and Y directions in a cartesian coordinate system; a certain gap is reserved between the central mass block and a lower cover plate, and the overload resistance is achieved by limiting the displacement of the central mass block in the Z direction in cartesian coordinates; and as the thickness and area of the central mass become larger, the bending moment of the mass block to the beams can offset the bending moment of the cilia to the beams when the hydrophone is subjected to vibration signals so as to reduce the vibration sensitivity of the hydrophone.

Description

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Claims

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Application Information

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Owner ZHONGBEI UNIV
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