Actuator equipped with failure detection sensor and method for detecting failure in actuator
A fault detection and actuator technology, applied in the measurement of vibration, instruments, measurement devices, etc., can solve problems such as hindering the smooth movement of movable bodies
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[0021] Hereinafter, an actuator with a sensor for failure detection and a method for detecting a failure of the actuator according to an embodiment of the present invention will be described in detail with reference to the drawings. However, the actuator with a sensor for failure detection and the failure detection method for the actuator of the present invention can be embodied in various forms, and are not limited to the embodiments described in this specification. This embodiment is provided with the intention that those skilled in the art will fully understand the scope of the invention by sufficiently disclosing it in the specification.
[0022] (Actuator with sensor for failure detection according to the first embodiment of the present invention)
[0023] figure 1 It is a schematic side view of the actuator 10 with a sensor for failure detection concerning 1st Embodiment of this invention. The actuator 10 of the present embodiment includes a linear guide portion 4 that...
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