Organic gas detection chip based on rhenium sulfide nano-devices

Abstract

The invention discloses an organic gas detection chip based on rhenium sulfide nano-devices. Anisotropic properties of electrical properties of rhenium sulfide (ReS2) nano-materials and changes in electrical anisotropic properties caused by organic gas adsorption are used as dimensions of gas detection to realize qualitative and quantitative detection of organic gas. The organic gas detection chipbased on the rhenium sulfide nano-devices has the advantages of simple structure and preparation method, high detection sensitivity, and capability of realizing qualitative and quantitative identification of the organic gas. The size of the organic gas detection chip is micron-sized and has ultra-low power consumption. The preparation process is a standard integrated circuit (IC) manufacturing process, is compatible with a system on chip (SOC) integration process. The devices can be conveniently embedded into various mobile terminals, and real-time monitoring of the organic gas is facilitated.

Description

technical field [0001] The invention belongs to the field of detection methods, in particular to an organic gas detection chip based on a rhenium sulfide nano device. Background technique [0002] Organic gases are the main markers of chemical production by-products, indoor environment monitoring, and human exhaled breath disease detection and prevention. Realizing the qualitative identification and quantitative detection of organic gases is of great significance and practical value. [0003] At present, there are two types of organic gas detection instruments on the market: one is a detector using gas chromatography; the second is a portable organic gas detector based on photoelectric ion detection. Gas chromatography (GC): It adopts the analysis method of separation first and then detection, which has the advantages of high sensitivity, good selectivity, high efficiency, high qualitative and quantitative accuracy, etc., but the detection method is expensive, the detection ...

AI Technical Summary

Problems solved by technology

Gas chromatography (GC): It adopts the analysis method of separation first and then detection, which has the advantages of high sensitivity, good selectivity, high efficiency, high qualitative and quantitative accuracy, etc., but the detection method is expensive, the detection method is complicated, and the detection instrument is large. Greatly limit its application prospects

As an improvement, a portable organic gas detector based on photoelectric ionization (PID) detection has appeared: it has the characteristics of portability and high sensitivity, but it is difficult to realize the qualitative identification and detection of organic gases, that is, only when the gas species is known, It can obtain its gas concentration value, but it is difficult to realize the identification detection of gas, which limits its practical value

[0004] At present, a lot of research has been done on the qualitative and quantitative identification of organic gases. The main research method is to use the sensor array method to establish the sensor response database of organic gases through the cross-sensitivity response of array sensing units to organic gases. The pattern recognition algorithm realizes the qualitative and quantitative identification of organic gases. This method has high sensitivity, high qualitative and quantitative accuracy, but the manufacture and integration of multiple sensing units increases the difficulty of its preparation; in addition, this method involves big data processing and algorithms Programming, software level requirements are high, which greatly limits its practical application

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