The invention discloses a low-pressure two-step preparation method of a
rhenium disulfide film, and belongs to the technical field of
semiconductor material preparation. In the first step,
rhenium powder is partially oxidized to form
rhenium / rhenium heptoxide mixed
powder. Secondly, rhenium / rhenium heptoxide is used as a rhenium source for rhenium disulfide growth, firstly, the active rhenium heptoxide with the high
melting point and the
low melting point can be dissolved to react with
sulfur powder to generate rhenium disulfide molecules, and then the rhenium disulfide molecules are deposited on the
mica substrate under the leading of
argon to serve as
nucleation points; then, high-melting-point rhenium powder begins to be dissolved under the assistance of dissolved rhenium heptoxide and is guided by
argon to reach the
mica substrate to continue growth of rhenium disulfide; and finally, obtaining the high-quality rhenium disulfide film on the
mica substrate. The high-quality rhenium disulfide thin film synthesized on the
mica substrate is expected to promote further application of the high-quality rhenium disulfide thin film in
electrical devices.