Piezoelectric ceramic driven micro-nano servo platform

Abstract

The invention provides a piezoelectric ceramic driven micro-nano servo platform. The platform comprises a base and displacement magnifying mechanisms; a cross open groove is formed in the base; two adjacent notches of the open groove extend outwards to form long notches; a micro displacement platform is a of a cross structure with four guide rods, and is mounted in the center of the open groove; two displacement magnifying mechanisms are mounted in the long notches for realizing displacement driving in X-axle and Y-axle directions; each displacement magnifying mechanism is correspondingly provided with a main guide mechanism, a secondary guide mechanism and a displacement sensor; the main guide mechanisms are positioned between the micro displacement platform and the displacement magnifying mechanisms, and are connected with the displacement magnifying mechanisms through flexible hinges; and the guide rods of the micro displacement platform are connected with the main guide mechanismsand the secondary guide mechanisms through flexible hinges. The servo platform has the advantages of compact structure, high displacement magnifying times, no frictional wear, no need of lubrication,high utilization rate of base materials and quick response.

Description

technical field [0001] The present invention mainly relates to the technical field related to micro-nano processing, in particular to a micro-nano servo platform driven by piezoelectric ceramics. Background technique [0002] Many branch technologies in nanotechnology, such as manufacturing, inspection, control, and measurement, all rely on the ultra-precise movement of nano-devices. Commonly used nano-drive devices are mostly driven by piezoelectric ceramics, but they have the disadvantages of small motion scale and large influence of parasitic motion. At present, the piezoelectric ceramic actuator with the largest output displacement can only output a displacement of about 0.1% of its own length; at the same time, affected by factors such as the flexible deformation of the piezoelectric material itself and manufacturing and installation errors, the output of the piezoelectric ceramic actuator is often accompanied by harmful parasitic displacement. Existing micro-nano ser...

AI Technical Summary

Problems solved by technology

Commonly used nano-drive devices are mostly driven by piezoelectric ceramics, but they have the disadvantages of small motion scale and large influence of parasitic motion

At present, the piezoelectric ceramic actuator with the largest output displacement can only output a displacement of about 0.1% of its own length; at the same time, affected by factors such as the flexible deformation of the piezoelectric material itself and manufacturing and installation errors, the output of the piezoelectric ceramic actuator is often accompanied by harmful parasitic displacement

Existing micro-nano servo platforms mostly adopt the method of subtractive machining on square base blocks. During this period, there are often disadvantages of low utilization rate of base materials and waste of materials. This is mainly due to the uncompact design of micro-nano servo platforms The small ratio of the slot area to the total area of ​​the base is caused by

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