Carriers for supporting substrates or masks
A substrate carrier and carrier technology, which is applied in the manufacture, transportation and packaging of electrical solid-state devices, semiconductor/solid-state devices, etc., can solve problems such as damage to alignment devices
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[0024] Reference will now be made in detail to various embodiments of the present disclosure, one or more examples of which are illustrated in the accompanying drawings. In the following description of the drawings, the same reference numerals refer to the same parts. Only the differences related to the individual embodiments are described. Each example is provided by way of explanation of the present disclosure and is not meant to limit the present disclosure. Furthermore, features illustrated or described as part of one embodiment can be used on, or combined in, other embodiments to yield yet further embodiments. This description is intended to cover such modifications and variations.
[0025] Embodiments described herein can be applied to inspect large area coated substrates, such as for fabricated displays. The substrates or substrate receiving areas configured for use in the apparatus and methods described herein may be large area substrates having dimensions of 1 squa...
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