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Clamping part for crystal grain polishing device

A technology of polishing device and clamping parts, which is applied in the field of polishing table, and can solve the problems of manual hand-holding error and waste of time

Pending Publication Date: 2020-01-14
ZHEJIANG SCI-TECH UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The purpose of the present invention is to provide a clamping piece for a crystal polishing device to solve the problem of manual hand-holding in the above-mentioned background technology that errors may occur during polishing, and the staff need to repeatedly confirm the degree of polishing, resulting in a waste of time.

Method used

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  • Clamping part for crystal grain polishing device
  • Clamping part for crystal grain polishing device
  • Clamping part for crystal grain polishing device

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Embodiment Construction

[0036] In order to make the technical means, creative features, goals and effects achieved by the present invention easy to understand, the present invention will be further described below in conjunction with specific embodiments.

[0037] Such as Figure 1 to Figure 5 As shown, a grain polishing device holder includes a base 2 and a polishing table 1, and also includes

[0038] A clamping assembly, the clamping assembly is used to fix the grain, and the clamping assembly includes a clamping part 43 and a support rod 41 fixedly connected to the clamping part 43;

[0039] Lifting assembly, the lifting assembly can adjust the height of the clamping device, the lifting assembly includes

[0040] Lifting platform 11, lifting platform 11 is erected on the top of polishing table 1, and its height is adjustable. The middle part of lifting platform 11 located directly above polishing table 1 is provided with a strip-shaped through hole, and the support rod 41 is rotatably arranged i...

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PUM

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Abstract

The invention discloses a clamping part for a crystal grain polishing device and relates to a polishing table. The clamping part comprises a base, a polishing table, a clamping assembly and a liftingassembly. The clamping assembly is used for fixing crystal grains and comprises a clamping part and a supporting rod fixedly connected with the clamping part. The lifting assembly can adjust the height of a clamping device. The problem is solved that during manual holding by hand, errors can be possibly caused during polishing, a worker needs to determine the polishing degree repeatedly, and the time is wasted.

Description

technical field [0001] The invention relates to a polishing table, in particular to a holding part of a grain polishing device. Background technique [0002] In order to ensure the quality of semiconductor devices, the wafers after certain semiconductor manufacturing processes are usually inspected. When the wafers are inspected, the wafers are usually cut into tiny grains (about 4-6 square millimeters) , and then in the figure 1 Polishing is carried out on the simple polishing machine table of the prior art shown so as to form the required detection surface (including plane, section and inclined surface). The simple polishing machine table in the prior art has a base and a polishing table set on the base for polishing crystal grains. When polishing crystal grains on the polishing table, the operator needs to hold the crystal grains for polishing and control by manually applying pressure. polishing. [0003] This kind of light-splitting equipment has the following disadva...

Claims

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Application Information

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IPC IPC(8): B24B37/11B24B37/27B24B37/34
CPCB24B37/11B24B37/27B24B37/34
Inventor 周香琴范飞
Owner ZHEJIANG SCI-TECH UNIV