Device for increasing usage amount of liquid metal organic source
A liquid metal and organic source technology, applied in gas/liquid distribution and storage, mechanical equipment, pipeline systems, etc., can solve the problem of insufficient size of metal organic source packaging bottles, to avoid failure risks, ensure safety, and reduce investment costs low effect
Pending Publication Date: 2020-05-08
安徽亚格盛电子新材料有限公司
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Problems solved by technology
[0003] Aiming at the deficiencies of the prior art, the object of the present invention is to provide a device for increasing the usage of liquid metal organic sources. Through accurate calculation of the usage state of liquid metal organic sources, a simple and easy device is provided, which eliminates the complicated The advanced liquid level monitoring and valve control system greatly reduces the cost and improves the simplicity of operation, and solves the problem of control risks and safety hazards caused by the insufficient size of metal-organic source packaging bottles in the current production process
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[0018] In order to deepen the understanding of the present invention, the present invention will be further described below in conjunction with the examples, which are only used to explain the present invention, and do not constitute a limitation to the protection scope of the present invention.
[0019] Such as figure 1 As shown, this embodiment provides a device for increasing the usage of liquid metal organic sources, including a spare steel cylinder 4, which is provided with a spare cylinder inlet valve 2, a spare cylinder outlet valve 3 and a spare cylinder bypass Valve 1, the backup cylinder inlet valve 2 and the backup cylinder outlet valve 3 are respectively arranged on both sides of the upper end of the backup cylinder 4, and the backup cylinder bypass valve 1 is arranged between the backup cylinder inlet valve 2 and the backup cylinder outlet valve 3, A use bottle 9 is arranged beside the spare steel cylinder 4, and the use bottle 9 is provided with a use bottle inle...
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The invention provides a device for increasing the usage amount of a liquid metal organic source. The device comprises a standby steel cylinder, a standby steel cylinder gas inlet valve, a standby steel cylinder gas outlet valve and a standby steel cylinder bypass valve are arranged on the standby steel cylinder, the standby steel cylinder gas inlet valve and the standby steel cylinder gas outletvalve are separately arranged on two sides of the upper end of the standby steel cylinder, and the standby steel cylinder bypass valve is arranged between the standby steel cylinder air inlet valve and the standby steel cylinder air outlet valve; a using cylinder is arranged beside the standby steel cylinder, a using cylinder air inlet valve, a using cylinder air outlet valve and a using cylinderbypass valve are arranged on the using cylinder, the using cylinder air inlet valve and the using cylinder air outlet valve are separately arranged on the two sides of the upper end of the using cylinder, and the using bottle bypass valve is arranged between the using bottle air inlet valve and the using bottle air outlet valve; and the standby steel bottle is directly used at the room temperature, the using bottle is arranged in a constant-temperature water tank to be used, and the standby bottle is switched to the standby bottle mode within the remaining 30% of the normal use of the using bottle. The device is simplified, cost is reduced, and safety is improved.
Description
technical field [0001] The invention relates to the field of metal-organic sources, in particular to a device for increasing the usage of liquid metal-organic sources. Background technique [0002] At present, when metal-organic sources are used, the demand is gradually increasing, but limited to the size of the machine and the specifications of the supporting constant temperature water tank, the size of the metal-organic source packaging cylinder is limited. In the past, some patented designs required the addition of complex control systems. During the production process, metal-organic sources were gradually added to the steel cylinders used to increase the usage, which was accompanied by a series of control risks and safety hazards. Therefore, it is particularly important to solve the problems of control risks and safety hazards caused by the insufficient size of metal-organic source packaging bottles in the current production process. Contents of the invention [0003]...
Claims
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IPC IPC(8): F17D1/00
CPCF17D1/005
Inventor 俞冬雷
Owner 安徽亚格盛电子新材料有限公司