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Control system, computer-readable recording medium, and method of control system

A control system, computer technology, applied in general control system, program control in sequence/logic controller, control/adjustment system, etc., can solve problems such as collision of transport arm or operator injury that cannot be ruled out

Pending Publication Date: 2020-08-11
EBARA CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

As a result, the possibility of danger (problem) such as collision of the transport arm or injury to the operator cannot be ruled out.

Method used

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  • Control system, computer-readable recording medium, and method of control system
  • Control system, computer-readable recording medium, and method of control system
  • Control system, computer-readable recording medium, and method of control system

Examples

Experimental program
Comparison scheme
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Embodiment Construction

[0040] Hereinafter, embodiments of the present invention will be described with reference to the drawings.

[0041] figure 1 It is a schematic diagram showing one embodiment of the semiconductor manufacturing apparatus 1 . A system capable of efficiently and safely adjusting each unit of the semiconductor manufacturing apparatus 1 (hereinafter, sometimes referred to as the control system 20 ) can be applied to figure 1 The semiconductor manufacturing apparatus 1 shown.

[0042] The control system 20 is applicable not only to the semiconductor manufacturing apparatus 1 but also to other apparatuses including a plurality of units in the same manner. For example, the control system 20 can also be applied to a plating apparatus including a plurality of plating units and transfer units. In one embodiment, the plating apparatus may include a liquid supply unit and a substrate processing unit that processes the substrate using the liquid sent from the liquid supply unit. The deta...

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PUM

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Abstract

The invention provides a control system, a computer-readable recording medium, and a method of a control system. The control system can efficiently perform an operational adjustment work and can safely adjust a unit. The control system 20 includes a controller 10 and a plurality of terminal devices connectable to the controller 10. The controller 10 includes a storage device 110 storing a processing program, and a processor 120 for performing operations and calculations based on the processing program. The processing program including instructions to give an access operation right, which permits access by an adjustment target unit to an access target unit, to a target terminal device which is one of the terminal devices in response to a request for the access operation right, transmitted from the target terminal device to the controller 10, on the condition that an exclusive operation right for the access target unit has not been given to any of the terminal devices.

Description

technical field [0001] The present invention relates to a control system for controlling a plurality of units constituting a semiconductor manufacturing apparatus, a computer-readable recording medium, and a method for the control system. Background technique [0002] A semiconductor manufacturing device is a composite device capable of performing a series of processes including polishing, cleaning, and drying of substrates such as wafers. Such a semiconductor manufacturing apparatus is constituted by various units such as a processing unit and a conveyance unit. [0003] Patent Document 1: Japanese Patent Laid-Open No. 2005-85784 [0004] Patent Document 2: Japanese Patent Laid-Open No. 2015-138786 [0005] In an operation adjustment operation of a semiconductor manufacturing apparatus, it is known to set operation rights for a unit in a terminal apparatus in order to limit a terminal apparatus that operates a unit of the semiconductor manufacturing apparatus (see Patent ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G05B19/05H01L21/67
CPCG05B19/05H01L21/67005H01L21/67155G05B19/41835G05B2219/45031Y02P90/02G05B19/418H04L9/32G05B19/04G05B23/02H01L21/67242H01L21/67219
Inventor 藤木雅之清泽信人北村圭
Owner EBARA CORP