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A tube mirror and automatic optical detection equipment

A tube mirror and lens technology, which is applied in the field of automatic optical inspection, can solve the problems that cannot meet the requirements of AOI large field of view, and the tube mirror has a small field of view angle, so as to solve the problem of small field of view, reasonable focal length, and satisfying The effect of resolution requirements

Active Publication Date: 2022-04-12
SHANGHAI YUWEI SEMICON TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
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AI Technical Summary

Problems solved by technology

[0003] The field of view of the traditional tube lens is relatively small, which can no longer meet the requirements of large field of view in AOI inspection

Method used

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  • A tube mirror and automatic optical detection equipment
  • A tube mirror and automatic optical detection equipment
  • A tube mirror and automatic optical detection equipment

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0050] continue to refer figure 1 , the tube lens provided by Embodiment 1 of the present invention includes a first lens group 11, a second lens group 12, and a third lens group 13, wherein the first lens group 11 can realize large field of view achromatic imaging by cooperating with an infinity-corrected objective lens , the second lens group 12 and the third lens group 13 respectively provide two coaxial interfaces, wherein the second lens group 12 can also be used to connect a coaxial lighting unit or focusing unit in addition to connecting the infinity correction objective lens, and the third lens Group 13 can be connected with two groups of imaging elements or a group of imaging elements and a group of focusing units. The first lens group 11 includes a first lens 31, a second lens 32, a third lens 33, a fourth lens 34 and a fifth lens 35 arranged in sequence from the object plane 21 to the image plane 22 along the optical axis, wherein the first lens 31 and the second l...

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Abstract

The invention discloses a tube mirror and automatic optical detection equipment. Wherein, the tube lens includes a first lens group with positive refractive power, and the first lens group includes a first lens, a second lens, a third lens, a fourth lens and a fifth lens arranged in sequence along the optical axis from the object plane to the image plane. The first lens has positive refraction power, the second lens has negative refraction power, the third lens has positive refraction power, the fourth lens has positive refraction power, and the fifth lens has negative refraction power. The tube lens and the automatic optical detection equipment provided by the invention realize the imaging of a large field of view.

Description

technical field [0001] Embodiments of the present invention relate to the technical field of automatic optical detection, and in particular, to a tube mirror and automatic optical detection equipment. Background technique [0002] Automatic Optical Inspection (AOI) technology can realize fast, high-precision, and non-destructive inspection of wafers, chips or other objects to be tested. This technology is widely used in PCBs, IC wafers, LEDs, TFTs and solar panels and many other fields. Automatic optical inspection technology generally uses an infinity-corrected objective lens for defect detection or re-inspection, and is equipped with a suitable tube lens to achieve wide-spectrum lighting and auto-focus functions. [0003] The field of view of the traditional tube lens is relatively small, which can no longer meet the requirements of large field of view in AOI inspection. Contents of the invention [0004] The invention provides a tube lens and automatic optical detecti...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G02B13/00G02B7/02G01N21/01
CPCG02B13/00G02B7/021G02B7/025G01N21/01
Inventor 徐达
Owner SHANGHAI YUWEI SEMICON TECH CO LTD
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