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Calibration method and calibration device for vacuum ultraviolet imaging spectrometer

An imaging spectrometer and vacuum ultraviolet technology, which can be applied in spectrum investigation and other directions, can solve problems such as affecting the normal progress of space exploration plans, and achieve the effects of saving development costs, reducing repetition, and shortening development cycles.

Active Publication Date: 2015-04-01
BEIJING ZHENXING METROLOGY & TEST INST
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Problems solved by technology

However, this key point has not yet received due attention, resulting in the discovery of problems after being carried into space, seriously affecting the normal progress of the space exploration program

Method used

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  • Calibration method and calibration device for vacuum ultraviolet imaging spectrometer
  • Calibration method and calibration device for vacuum ultraviolet imaging spectrometer
  • Calibration method and calibration device for vacuum ultraviolet imaging spectrometer

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Embodiment Construction

[0063] Embodiments of the present invention will be described below with reference to the drawings. Elements and features described in one drawing or one embodiment of the present invention may be combined with elements and features shown in one or more other drawings or embodiments. It should be noted that representation and description of components and processes that are not relevant to the present invention and known to those of ordinary skill in the art are omitted from the drawings and descriptions for the purpose of clarity.

[0064] The invention provides a calibration method for a vacuum ultraviolet imaging spectrometer, comprising:

[0065] Calibrate the wavelength measurement range of the vacuum ultraviolet imaging spectrometer;

[0066] Calibrate the wavelength accuracy of vacuum ultraviolet imaging spectrometer;

[0067] Calibrate the spectral responsivity of vacuum ultraviolet imaging spectrometer;

[0068] Calibration of VUV imaging spectrometer uniformity; ...

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Abstract

The invention provides a calibration method for a vacuum ultraviolet imaging spectrometer. The calibration method comprises the following steps of calibrating a wavelength measurement range, wavelength accuracy, spectrum response rate, uniformity and space angle resolution of the vacuum ultraviolet imaging spectrometer. The invention also provides a calibration device for the vacuum ultraviolet imaging spectrometer. The calibration device comprises a light source, a vacuum ultraviolet monochrome beam splitting system, a vacuum ultraviolet integrating sphere, a vacuum ultraviolet target and a vacuum ultraviolet collimating optical system which are arranged in an optical path in sequence, and further comprises a vacuum ultraviolet standard detector which is arranged on the output end of the vacuum ultraviolet collimating optical system together with the vacuum ultraviolet imaging spectrometer needing to be calibrated in a switchable manner, and a vacuum three-dimensional scanning mechanism which is used for implementing transformation of a space angle of the vacuum ultraviolet imaging spectrometer. By adopting the technical scheme of the invention, defects of the vacuum ultravioletimaging spectrometer in a design process can be timely discovered, and meanwhile, accuracy for data acquisition of the vacuum ultraviolet imaging spectrometer can be effectively guaranteed.

Description

technical field [0001] The invention relates to the technical field of calibration of optical testing equipment, in particular to a calibration method for a vacuum ultraviolet imaging spectrometer and a calibration device for a vacuum ultraviolet imaging spectrometer for realizing the calibration method for the vacuum ultraviolet imaging spectrometer. Background technique [0002] The working spectrum of the vacuum ultraviolet imaging spectrometer is just an important characteristic spectrum of the space material composition, and it can simultaneously give the vacuum ultraviolet spectral information and vacuum ultraviolet image information of the detection target, and realize the integration of the spectrum. It has the advantage that the vacuum ultraviolet imaging With the rapid advancement of aerospace technology and the unprecedented development of space science research, spectrometers have become the focus of attention from all countries in the world. They have been launch...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01J3/28
Inventor 孙广尉王加朋任小婉
Owner BEIJING ZHENXING METROLOGY & TEST INST
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