High-precision microscope X-axis translation mechanism

A translation mechanism, microscope technology, applied in microscopes, optics, instruments, etc., can solve problems such as high cost, poor accuracy and stability requirements, etc.

Inactive Publication Date: 2020-10-20
深圳市森美协尔科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0002] At present, some existing X-axis translation mechanisms of microscopes cannot meet the requirements of semiconductor testing equipment in terms of accuracy and stability, and can only import imported products, which are expensive

Method used

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  • High-precision microscope X-axis translation mechanism
  • High-precision microscope X-axis translation mechanism
  • High-precision microscope X-axis translation mechanism

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Embodiment Construction

[0022] The technical solutions of the present invention will be described below in conjunction with the accompanying drawings and embodiments.

[0023] Such as Figure 1 to Figure 3 As shown, a high-precision microscope X-axis translation mechanism of the present invention includes a base 21, and the base 21 is provided with a drive assembly that facilitates the sliding of the microscope, a slide rail assembly that facilitates the slide of the microscope, and a set that cooperates with the slide rail assembly. An auxiliary slide assembly, and a sensing assembly to detect the translation process of the microscope. The above constitutes the basic structure of the present invention.

[0024] In this embodiment, the drive assembly includes a servo motor 2, a ball screw 8 and a nut seat 17, the ball screw 8 is connected to the servo motor 2, the nut seat 17 is movably sleeved on the ball screw 8, and the nut seat 17 is fixedly connected with the slide rail assembly. With such a ...

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Abstract

The invention relates to the technical field of microscope accessories, in particular to a high-precision microscope X-axis translation mechanism, which comprises a base, and is characterized in thatthe base is provided with a driving assembly convenient for a microscope to slide, a sliding rail assembly convenient for the microscope to slide, an auxiliary sliding assembly matched with the sliding rail assembly, and a sensing assembly for detecting the translation process of the microscope. By the adoption of the structure, the requirement for micron-scale transmission can be met, transmission is precise and stable, the mechanism can be applied to semiconductor testing equipment, the problem that the product needs to depend on foreign imports is effectively solved, and the cost is lower than that of products imported from abroad.

Description

technical field [0001] The invention relates to the technical field of microscope accessories, in particular to a high-precision microscope X-axis translation mechanism. Background technique [0002] At present, some existing X-axis translation mechanisms of microscopes cannot meet the requirements of semiconductor testing industry equipment in terms of accuracy and stability, and can only import products from abroad, which are expensive. [0003] Therefore, it is necessary to develop a microscope X-axis translation mechanism suitable for the requirements of the semiconductor testing industry to solve the dilemma that some translation mechanisms need to rely on foreign imports. Contents of the invention [0004] Aiming at the deficiencies of the existing technology, the present invention provides a high-precision microscope X-axis translation mechanism, which can meet the requirements of micron-level transmission, precise and stable transmission, and can be applied to semi...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B21/26G02B21/24
CPCG02B21/24G02B21/26
Inventor 陈亮刘世文
Owner 深圳市森美协尔科技有限公司
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