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Single-crystal piezoelectric resonator for constructing 5G base station radio frequency filter and preparation method

A technology of radio frequency filters and piezoelectric resonators, which is applied in the field of piezoelectric resonators, can solve problems such as not being well applicable, and achieve the effects of meeting the requirements of electrical performance and structural performance, low insertion loss, and increasing the loadable power

Pending Publication Date: 2020-12-29
ZHEJIANG STARSHINE SEMICON CO LTD
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

This patent is not well suited for the development of 5G small base stations that are smaller in size than macro base stations

Method used

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  • Single-crystal piezoelectric resonator for constructing 5G base station radio frequency filter and preparation method
  • Single-crystal piezoelectric resonator for constructing 5G base station radio frequency filter and preparation method
  • Single-crystal piezoelectric resonator for constructing 5G base station radio frequency filter and preparation method

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Embodiment Construction

[0051] The present invention will be described in detail below in conjunction with specific embodiments. The following examples will help those skilled in the art to further understand the present invention, but do not limit the present invention in any form. It should be noted that those skilled in the art can make several changes and improvements without departing from the concept of the present invention. These all belong to the protection scope of the present invention.

[0052] Such as Figure 1-10 As shown, a single crystal piezoelectric resonator for constructing a 5G base station radio frequency filter according to the present invention is characterized in that it includes: a resonator substrate 1, a protective layer 2, a resonator plate bottom electrode 3, a single Crystal piezoelectric material 4, through-hole metal 5, first raised structure 6, resonator intersecting upper electrode 7, and second raised structure 8; the resonator substrate 1 can support a 5G base s...

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Abstract

The invention provides a single-crystal piezoelectric resonator for constructing a 5G base station radio frequency filter and a preparation method. The single-crystal piezoelectric resonator comprisesa resonator substrate 1, a protective layer 2, a resonator flat plate bottom electrode 3, a single-crystal piezoelectric material 4, through hole metal 5, a first convex structure 6, a resonator cross upper electrode 7 and a second convex structure 8, wherein the resonator substrate 1 can support the single-crystal piezoelectric resonator used for constructing the 5G base station radio frequencyfilter; the resistance of the resonator substrate 1 is greater than a set threshold value; the lattice constant of the resonator substrate 1 is matched with that of the single-crystal piezoelectric material 4; the protective layer 2 covers the resonator plate bottom electrode 3 and the resonator cross upper electrode 7. According to the invention, the absolute flatness of the single-crystal piezoelectric material is ensured by adopting a process of etching the air cavity behind the dielectric material. The air reflection cavity has the advantages of perfect sound wave reflection, convenience in processing, high reliability and the like.

Description

technical field [0001] The present invention relates to the technical field of piezoelectric resonators, in particular to a single crystal piezoelectric resonator for constructing a radio frequency filter of a 5G base station and a preparation method thereof. Background technique [0002] With the rapid development of 5G (fifth generation mobile communication technology) communication technology, various new high-performance communication systems are emerging. Mobile terminal products such as mobile phones, tablets, Bluetooth, and WiFi have unprecedented transmission rates and link capabilities, and base station systems, as the basic end of mobile communication technology, are in urgent need of a new technological revolution. High-performance, miniaturized small base station systems are traditional The supplement of the macro base station system is the key technological innovation of the base station system in 5G communication technology. As one of the most critical compone...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H03H9/17H03H9/56
CPCH03H9/17H03H9/56
Inventor 高安明刘伟姜伟
Owner ZHEJIANG STARSHINE SEMICON CO LTD