5G small base station radio frequency sound wave filter
An acoustic wave filter and small base station technology, applied in the field of filters, can solve the problems of power and size of 5G small base station filters, etc., and achieve the effect of increasing the loadable power and increasing the loadable power.
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Embodiment 1
[0044] figure 1 The first common resonator proposed by us, the piezoelectric resonator structure includes a resonator substrate 1, a sacrificial layer 2, a protective layer 3, a resonator plate bottom electrode 4, a resonator piezoelectric layer 5, and a resonator plate Upper electrode 6, air reflection cavity 7. Wherein, the resonator substrate 1 provides support for the resonator, and the substrate material is generally a high-resistance material to reduce acoustic energy leakage. The substrate material 1 can generally be sapphire, silicon carbide, single crystal silicon or high-resistance silicon, etc., with a thickness of about tens to hundreds of microns. The sacrificial layer 2 is formed on the resonator substrate 1 and is pre-filled to form the air reflection cavity 7 of the resonator. Its thickness is the depth of the air reflection cavity. The sacrificial layer 2 is usually made of a material that can be easily removed by wet or dry etching. The protective layer 3 ...
Embodiment 2
[0046] figure 2 The second common resonator proposed by us, this piezoelectric resonator structure includes resonator substrate 1, sacrificial layer 2, protective layer 3, resonator plate bottom electrode 4, resonator piezoelectric layer 5, air reflection cavity 7. The resonator crosses the upper electrode 8 . figure 2 The middle resonator adopts a cross-up electrode structure, and the number of electrodes can be determined according to requirements. The size and shape of each electrode are the same, and the distance between the electrodes is also equal. The upper electrode 8 has multiple connection modes: electric connection (when the bottom electrode 4 is connected to the ground), grounding (when the bottom electrode 4 is connected to the electricity), cross electrodes connected to the electricity and grounded in turn. In addition, more importantly, the electrode width of the upper electrode 8 will also affect the frequency of the resonator. The electrode width of the up...
Embodiment 3
[0048] image 3 The third common resonator proposed by us, this piezoelectric resonator structure includes a resonator substrate 1, a resonator plate bottom electrode 4, a resonator piezoelectric layer 5, a resonator plate upper electrode 6, and a low-impedance reflective layer 9. A high-impedance reflective layer 10 . Among them, the part formed alternately by several layers of low-impedance reflective layers 9 and several layers of high-impedance reflective layers 10 is called a specular reflector, marked as 11 . The number of low-impedance reflective layers 9 is generally multiple layers. The first layer is located under the bottom electrode 4 of the resonator plate, and the second and subsequent layers are sequentially placed under the high-impedance reflective layer 10 . The material of the low-impedance reflective layer is usually a material with low acoustic impedance, the most common being silicon dioxide (SiO2). In addition to low acoustic impedance, silicon dioxide...
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