Quartz boat for silicon wafer processing

Abstract

The invention relates to the technical field of silicon wafer diffusion, and discloses a quartz boat for silicon wafer processing; the quartz boat comprises two baffle plates, the outer surfaces of the two baffle plates are both fixedly provided with boat cantilever frames, and an upper support rod is fixedly connected between the tops of the inner surfaces of the two baffle plates. A large clamping groove and a small clamping groove are formed in the top face of the upper supporting rod, a lower supporting rod is fixedly connected between the bottoms of the inner surfaces of the two baffles,and a large groove and a small groove are formed in the top of the lower supporting rod. According to the quartz boat for silicon wafer processing, the two groove lengths are formed in the silicon wafer upper supporting rod and the silicon wafer lower supporting rod, and the two grooves are distributed alternately, so that when a square silicon wafer is inserted, the two grooves are beneficial foran erasing person to conveniently identify and avoid misplug; in addition, since the two groove lengths adapt to silicon wafers of two sizes, a large silicon wafer cannot be inserted due to small misplaced groove lengths; small silicon wafer dislocation can be loosened due to the groove length, so that an operator can conveniently find errors in time, and dislocation damage to the silicon wafersis avoided.

Description

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine

Login to View More

AI Technical Summary

Benefits of technology

This patented technology allows for easier identification and management of silicone wires during manufacturing processes compared to previous methods such as lithography or etching techniques that were previously used. Additionally, it provides an improved method by allowing larger sized waf ers to easily insert smaller ones without damaging them when needed. Overall, this new design enhances efficiency while reducing costs associated therewith.

Problems solved by technology

This patented technical problem addressed in this patents relates to improving the accuracy with inserting rectangular silicone wires (SWI) inside quartz vessels that hold silicon substrates during manufacturing processes such as chemical vapor deposition (CVD). However, current methods often cause issues where multiple SWi' s may require different types of wiring techniques depending upon their specific dimensions. Additionally, there has been no solution provided by these prior art solutions to addressing alignment errors caused by incorrect placement of smaller-diameter weldings within larger-dimension spaces without requiring purchasing an entirely new vessel altogether.

Images