Flow rate measuring device
A flow measurement device and flow detection technology, applied in the measurement device, volume flow ratio measurement, measurement flow/mass flow, etc., can solve the problems of sensor element output fluctuation and flow measurement accuracy decline, and achieve the effect of suppressing output fluctuation.
Pending Publication Date: 2021-04-09
ORMON CORP
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Problems solved by technology
However, if the sensor element is arranged in this way, the output of the sensor element that detects the temperature distribution may fluctuate due to the influence of impurities such as dust or dust mixed in the fluid flowing in the flow path.
That is, the inventors of the present invention found that in the case where the flow sensor is configured as described above, the accuracy of the flow measurement decreases
Method used
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[0070]Hereinafter, embodiments of the present invention (hereinafter also referred to as "the embodiment") are described in the drawings. However, the present embodiment described below is an example of the present invention in all respects. Of course, various improvements and deformations can be made without departing from the scope of the invention. That is, in the implementation of the present invention, the specific structure corresponding to the embodiment can be appropriately employed.
[0071]1 applicable case
[0072]usefigure 1 (A) to illustrate an example of the applicable scene of the present invention.figure 1 (A) a cross-sectional view of the flow measuring device 100 of the present embodiment. The flow measuring device 100 of the present embodiment includes a substrate 5 of the detecting element 1 and the mounting detecting element 1. The detecting element 1 has a micro heater 40 and two thermopiles 41a, 41b, detecting a temperature difference in the flow direction of the ga...
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The invention provides a flow rate measuring device which suppresses output variation of a sensor element caused by influence of impurities flowing in a flow path. This flow rate measurement device is provided with: a flow rate detection unit which is disposed in a flow path, outputs a value relating to a temperature difference in the flow direction of a fluid that changes in accordance with the flow rate of the fluid flowing in the flow path, and detects the flow rate using the output value; and a cover member that covers the flow rate detection unit in the flow path. The cover member is provided with: an inflow hole which is provided upstream of a portion where the flow rate detection unit is disposed, and through which a fluid flows from a flow path outside the cover member to the portion inside the cover member, and on which the flow rate detection unit is disposed; and an outflow hole which is provided on the downstream side of the flow rate detection unit and which causes the fluid to flow out from the inside of the cover member wherein the portion in which the flow rate detection unit is disposed to a flow path outside the cover member. The outer surface of the cover member on the upstream side of the portion where the flow rate detection unit is arranged has an inclined surface inclined in the direction of the inlet of the inflow hole.
Description
Technical field[0001]The present invention relates to a flow rate measuring device.Background technique[0002]A technique (for example, Patent Documents 1 to 3) using a flow sensor to measure the flow of fluid flowing within the flow path (for example, Patent Documents 1 to 3). Patent Document 1 discloses the temperature distribution information of the heat generator detecting the flow path by the thermal flow sensor, and calculates the content of the flow of the fluid based on the temperature distribution information. Patent Document 2 discloses a flow sensor and a rectifier on a flow path within an electronic gas flow meter. Patent Document 3 discloses a thermal flow sensor including a substrate including a first substrate and a second substrate and an upper flow path forming member disposed on the substrate. Further, the rectangular recess is provided below the upper flow path forming member, and the concave portion forms a second flow path between the upper surface of the second ...
Claims
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IPC IPC(8): G01F1/684G01F1/688G01F15/12
CPCG01F1/6842G01F1/6888G01F15/12G01F1/692G01F5/00G01F1/6847
Inventor 中尾秀之龟井诚山本克行
Owner ORMON CORP