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Modulation profile measurement system and method based on inclined focusing and rotary scanning

A technology of contour measurement and rotary scanning, which is applied in the field of optical measurement, can solve problems such as complex devices, small measurement range, and harsh measurement conditions, and achieve the effect of expanding the measurement depth and flexible measurement system

Active Publication Date: 2021-06-01
SICHUAN UNIV
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Problems solved by technology

[0003] Aiming at the above-mentioned deficiencies in the prior art, the present invention provides a modulation profile measurement system and method based on oblique focusing and rotational scanning, which solves the problems of complex devices, harsh measurement conditions and small measurement range in existing measurement methods

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  • Modulation profile measurement system and method based on inclined focusing and rotary scanning
  • Modulation profile measurement system and method based on inclined focusing and rotary scanning
  • Modulation profile measurement system and method based on inclined focusing and rotary scanning

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Embodiment Construction

[0040]DETAILED DESCRIPTION OF THE INVENTION The present invention will be described below to understand the present invention, but it should be understood, and the present invention is not limited to the scope of the specific embodiments, and in terms of ordinary skill in the art, as long as various changes Within the spirit and scope of the invention appended claims, it is apparent from the appended claims.

[0041]After the sinusoidal stripes passed through the projectile, the striped pattern in its focusing plane was the most clear, and the striped system was also the highest, and the adjustment was gradually smaller before and after its imaging surface (FIP: FOCUSED Image Plane), which was gauge, such asfigure 1 Indicated.

[0042]This system is likefigure 2 As shown, the following components are included: gratings, CCD cameras, projection lenses, mirrors and beam mirrors;

[0043]The grating is placed on the projection lens side; the mirror is placed on the other side of the projection ...

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Abstract

The invention discloses a modulation profile measurement system and method based on inclined focusing and rotary scanning. The method comprises the steps that a grating is placed in an inclined optical axis manner, a clear image surface of the grating is an inclined plane in a measurement space, a high-reflection mirror is placed behind a projection lens, and the optical axis is deflected by nearly 90 degrees; the reflection mirror is rotated to enable a fringe clear imaging surface to complete scanning of the surface of a whole measured object, a CCD camera synchronously captures a fringe pattern carrying object surface information through a beam splitter, a modulation degree curve of each pixel is obtained through fringe light intensity information by means of a phase shift technology, and according to the obtained modulation degree peak value sequence number, the height of each pixel can be reconstructed by utilizing known system mapping parameters. According to the invention, axial scanning is replaced by rotary scanning, so that the measurement system is more flexible and compact, and the measurement depth can be obviously enlarged by obliquely placing the grating.

Description

Technical field[0001]The present invention relates to the field of optical measurement, and more particularly to a modulated contour measuring system and method based on inclined focus and rotary scanning.Background technique[0002]Common axis technology, also known as vertical measurement technology (MMP: Modulation Measurement Profilometry), projector shaft and camera coaxial, can overcome the occlusion shadow problem brought by triangular measurements. There are three main types of vertical measurement techniques, the first is to move the object to be measured. According to the relationship between the adjustment and the height, it is only suitable for telex system; the other is a fixed object and imaging system, by moving The projection portion of the system, such as a mobile projector, or moving the grating, or using a zoom lens to achieve zoom, thereby establishing a relationship between scanning steps and striped modifications; the third is no mobile system, using two separati...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B11/25
CPCG01B11/2518G01B11/254
Inventor 刘元坤任慧陈文静薛俊鹏张启灿王亚军申俊飞
Owner SICHUAN UNIV
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