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Detection method, detection device, detection equipment and computer readable storage medium

A detection method and technology of detection equipment, which can be used in measurement devices, geophysical measurement, measurement instrument components, etc., can solve problems such as low scanning efficiency

Inactive Publication Date: 2021-07-06
SKYVERSE TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

In order to achieve precise control of the scanning position, it is necessary to return to the initial position after each scan to locate the position of the sensor. Although the accuracy of scanning is guaranteed, the scanning efficiency is low

Method used

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  • Detection method, detection device, detection equipment and computer readable storage medium
  • Detection method, detection device, detection equipment and computer readable storage medium
  • Detection method, detection device, detection equipment and computer readable storage medium

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Embodiment Construction

[0026] Embodiments of the present application are described in detail below, examples of which are shown in the drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below by referring to the drawings are exemplary, are only for explaining the embodiments of the present application, and should not be construed as limiting the embodiments of the present application.

[0027] see figure 1 , figure 2 and image 3 , the embodiment of the present application provides a detection method. The detection method includes steps:

[0028] 011: Initialize the transmission member 20, so that the transmission member 20 moves to the first origin position;

[0029] 012: When the scanning part 30 scans the test part 200 for the Nth time, the transmission part 20 is controlled to drive the scanning part 30 to scan the test part 200 from the first origin position to t...

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Abstract

The invention discloses a detection method, a detection device, detection equipment and a nonvolatile computer readable storage medium. The detection method comprises the following steps: initializing a transmission part to enable the transmission part to move to a first original point position; when the to-be-tested piece is scanned by the scanning piece for the Nth time, controlling the transmission piece to drive the scanning piece to scan the to-be-tested piece from the first original point position to the second original point position, and N is a positive integer; and when the scanning piece scans the to-be-tested piece for the (N+1)th time, controlling the transmission piece to drive the scanning piece to scan the to-be-tested piece from the second original point position to the first original point position. According to the detection method, the detection device, the detection equipment and the non-volatile computer readable storage medium provided by the embodiment of the invention, the processor controls the transmission part to drive the scanning part to move between the first original point position and the second original point position when the scanning part scans the to-be-tested piece for the Nth time and the (N+1)th time, and the movement directions are opposite; the scanning piece does not need to return to the scanning starting point after each time of scanning is completed, so that the scanning efficiency is improved.

Description

technical field [0001] The present application relates to the technical field of semiconductor detection, and more specifically, to a detection method, a detection device, a detection device, and a non-volatile computer-readable storage medium. Background technique [0002] Nowadays, when scanning and detecting the state of a workpiece, such as a wafer, the sensor often scans along a fixed direction to detect the state of the wafer. In order to achieve precise control of the scanning position, it is necessary to return to the initial position after each scan to locate the position of the sensor. Although the accuracy of scanning is guaranteed, the scanning efficiency is low. Contents of the invention [0003] Embodiments of the present application provide a detection method, a detection device, a detection device, and a non-volatile computer-readable storage medium. [0004] The detection method in the embodiment of the present application includes: initializing the trans...

Claims

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Application Information

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IPC IPC(8): G01D21/00G01D11/00G01B21/00G01B21/08G01V9/00
CPCG01B21/00G01B21/08G01D11/00G01D21/00G01V9/00
Inventor 陈鲁王兵张嵩
Owner SKYVERSE TECH CO LTD
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