Multipurpose plasma self-sustaining exciting electrode
A technology to excite electrodes and plasma, applied in the direction of plasma, electrical components, etc.
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[0029] In order to facilitate the understanding of the present application, the present application will be described more fully below with reference to the relevant drawings. Embodiments of the application are given in the drawings. However, the present application can be embodied in many different forms and is not limited to the embodiments described herein. On the contrary, the purpose of providing these embodiments is to make the disclosure of this application more thorough and comprehensive.
[0030] Such as figure 1 , figure 2 , image 3 , Figure 4 shown. A multi-purpose plasma self-sustaining excitation electrode, including an insulating support 1, a high-voltage electrode module, an adjustment ring 4, and a low-voltage electrode 5. A high-voltage cavity 14 with an opening facing upward is arranged in the insulating support 1, and the high-voltage electrode module is installed in the high-voltage cavity 14. , the insulating support 1 is provided with a cylindric...
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