Micro-structure array processing device and method based on variable-pitch fly cutter cutting

A technology of microstructure array and processing device, applied in feeding device, metal processing, automatic control device, etc., can solve the problems of poor processing quality, complex device structure, limited cutting efficiency, etc., and achieve good processing consistency and processing efficiency. high effect

Active Publication Date: 2021-11-05
霖鼎光学(上海)有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0006] It can be seen that the existing various microstructure array processing devices and methods still have problems such as poor processing quality, limited cutting efficiency, and complex device structures. It is urgent to develop a new device and method that can be used for microstructure array processing. square

Method used

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  • Micro-structure array processing device and method based on variable-pitch fly cutter cutting
  • Micro-structure array processing device and method based on variable-pitch fly cutter cutting
  • Micro-structure array processing device and method based on variable-pitch fly cutter cutting

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Embodiment

[0041] Such as Figure 1-Figure 2As shown, the embodiment of the present invention provides a microstructure array processing device based on variable-pitch flying knife cutting, including a base 1, a machine tool X-axis 2, a machine tool Y-axis 3, a machine tool Z-axis 4, a machine tool B-axis 5, a machine tool C-axis 6, vacuum chuck 7, variable-pitch flying knife x-axis 8, and workpiece fixture 9; machine tool X-axis 2 and machine tool Z-axis 4 are arranged on the base 1 in a T-shaped structure, and machine tool Y-axis 3 is vertically fixed on the machine tool X On the sliding table of the axis 2, the B-axis 5 of the machine tool and the C-axis 6 of the machine tool are respectively installed on the sliding table of the Z-axis 4 of the machine tool and the Y-axis 3 of the machine tool. Connection, the workpiece holder 9 is connected with the turntable of the B-axis 5 of the machine tool.

[0042] Among them such as Figure 3-Figure 4 As shown, the variable-pitch flying kni...

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Abstract

The invention discloses a micro-structure array processing device and method based on variable-pitch fly cutter cutting, and belongs to the technical field of ultra-precision turning. The processing device comprises a base, a machine tool X axis, a machine tool Y axis, a machine tool Z axis, a machine tool B axis, a machine tool C axis, a vacuum suction cup, a variable-pitch fly cutter x axis and a workpiece clamp. In the micro-structure processing process, a linear motor, a voice coil motor and a piezoelectric positioning platform which are subjected to high-rigidity and high-frequency processing are selected to precisely control the rotation radius of a tool, so that the centrifugal force condition caused by eccentric rotation of the tool can be optimized to a certain extent, and fly-cutting processing has the capability of processing common micro-structures under the condition that slow tool or fast tool servo is not relied on; and compared with common turning processing, the fly-cutting processing has the advantage that the rotation axis is variable, therefore, the fly-cutting processing has the capability of processing a micro-structure array.

Description

technical field [0001] The invention relates to a microstructure array processing device and method based on variable-pitch flying knife cutting, and belongs to the technical field of ultra-precision turning. Background technique [0002] As a miniaturized and highly integrated basic optical component, microstructure array has been widely used in the fields of optoelectronics, information and precision engineering because of its high fill factor and optical performance. At the same time, the micro-nano-scale geometric topological features of microstructure arrays put forward higher requirements for ultra-precision processing technology. Existing manufacturing methods such as lithography, special energy fields, and high-energy beams are usually limited to certain special materials, and the processes are complicated and the environment is harsh. Mold-based imprinting and lithography technology is the most feasible way to achieve high-efficiency fabrication of microstructure a...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B23Q15/00B23Q1/25B23Q15/22
CPCB23Q15/00B23Q1/25B23Q15/22Y02P70/10
Inventor 张鑫泉王震东任明俊张哲朱利民
Owner 霖鼎光学(上海)有限公司
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