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3D mapping of sample in charged particle microscope

A technology of charged particle microscope and particle microscope, which is applied in the direction of circuits, discharge tubes, electrical components, etc.

Pending Publication Date: 2022-06-10
FEI CO
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

As a result, sample positioning and focusing is time-consuming and error-prone, and the required operator skills may require supervision of new users that may cause sample / pole piece contact, introduce astigmatism, misalignment, or damage components or samples

Method used

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  • 3D mapping of sample in charged particle microscope
  • 3D mapping of sample in charged particle microscope
  • 3D mapping of sample in charged particle microscope

Examples

Experimental program
Comparison scheme
Effect test

example 1

[0042] The CPB system 100 includes a vacuum chamber enclosure 112 that can be evacuated using a vacuum pump (not shown) and generally defines a first volume 112A and a second volume 112B, the first volume containing the CPB source 106 and selected Other CPB optical components, the second volume is positioned to receive the sample S and the sample stage 114 . A column isolation valve (CIV) 120 is positioned to separate the first volume 112A and the second volume 112B. In general, the CIV 120 can be used to hermetically isolate the first volume 112A from the second volume 112B during sample exchange. Sample stage 114 is movable in an X-Y plane as shown relative to coordinate system 150, where the Y axis is perpendicular to the plane of the drawing. The sample stage 114 is further movable vertically (along the Z axis) to compensate for height variations of the sample S and to help focus the beam at the sample S. The sample stage 114 can also rotate about an axis parallel to the...

example 2

[0048] Example 4

example 3

[0050] Example 5

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Abstract

3D mapping of a sample in a charged particle microscope. A sample may be positioned on an optical axis of a charged particle microscope based on a 3D mapping of the sample. The 3D mapping is generated with backside illumination and telecentric imaging of the sample, resulting in a contour image. The contour images are combined to form the 3D mapping. A processor is coupled to a sample stage using the 3D mapping to position the selected sample or sample portion for imaging in the charged particle microscope. In some examples, the processor responds to selection of a sample using a graphical interface such that the sample stage is controlled to securely position the selected sample without further operator intervention.

Description

technical field [0001] The present disclosure relates to methods and systems for microscopy, and more particularly, to localizing samples in charged particle microscopy. Background technique [0002] Positioning samples for electron microscopy can be time-consuming and requires diligence from the operator. Samples of various sizes on the sample holder must be carefully positioned to avoid contact with microscope components, the pole piece for the magnetic lens, the electron detector, or other components. In some cases, the sample holder holds multiple samples at different heights, and the operator must carefully move each sample into the microscope field of view. After positioning in the field of view, additional operator time is required to bring the sample into focus. As a result, sample positioning and focusing is time-consuming and error-prone, and the required operator skills may require supervision of new users that may cause sample / pole piece contact, introduce asti...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01J37/26H01J37/28
CPCH01J37/26H01J37/261H01J37/28H01J37/20H01J37/226H01J37/18H01J37/222H01J37/244H01J2237/04928
Inventor J·卡梅内奇
Owner FEI CO