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Resonant device and manufacturing method thereof

A resonator device and resonator technology, applied in impedance networks, electrical components, etc., can solve the problems of excellent frequency adjustment process efficiency and small change in the weight of the vibrating arm, and achieve the effect of improving productivity

Pending Publication Date: 2022-07-08
MURATA MFG CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] However, according to the frequency adjustment method of Patent Document 1, for example, when a metal film is formed on the upper cover side of the front end of the vibrating arm, even if the front end of the vibrating arm collides with the upper cover, the metal film will not be scraped off. There are cases where ductile deformation occurs, so the weight of the vibrating arm hardly changes
In addition, since the vibration amplitude of the vibrating arm is limited due to the collision of the front end portion of the vibrating arm with the upper cover, even if the front end portion of the vibrating arm hits the lower cover, there may be a small change in the weight of the vibrating arm.
Therefore, according to the conventional method, it may not be said that the efficiency of the step of adjusting the frequency is excellent.

Method used

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  • Resonant device and manufacturing method thereof
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  • Resonant device and manufacturing method thereof

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no. 1 approach ＞

[0023] First, refer to figure 1 and figure 2 , the configuration of the resonance device 1 according to the first embodiment of the present invention will be described. figure 1 It is a perspective view schematically showing the appearance of the resonance device of the first embodiment. figure 2 It is an exploded perspective view schematically showing the configuration of the resonance device according to the first embodiment.

[0024] Hereinafter, each configuration of the resonance device 1 will be described. In each of the drawings, in order to clarify the relationship between the drawings and help understand the positional relationship of each member, an orthogonal coordinate system composed of the X-axis, the Y-axis, and the Z-axis is sometimes denoted for convenience. The directions parallel to the X-axis, the Y-axis, and the Z-axis are referred to as the X-axis direction, the Y-axis direction, and the Z-axis direction, respectively. The plane defined by the X axi...

no. 2 approach ＞

[0107] Next, refer to Figure 10 , the configuration of the resonance device 2 according to the second embodiment will be described. Figure 10 It is a cross-sectional view schematically showing the configuration of the resonator device of the second embodiment.

[0108] In the resonator device 2 of the second embodiment, the resonator 10 is warped downward in a state where no voltage is applied. In other words, the vibrating arms 121A to 121D are configured so that the distance from the lower cover 20 decreases toward the front end portions 122A to 122D.

[0109] Accordingly, even if the depth D2 of the cavity 31 of the upper cover 30 is equal to or smaller than the depth D1 of the cavity 21 of the lower cover 20 , the gap G2 on the upper cover 30 side can be made larger than the gap G1 on the lower cover 20 side .

no. 3 approach ＞

[0111] Next, refer to Figure 11 , the configuration of the resonance device 3 according to the third embodiment will be described. Figure 11 It is a cross-sectional view schematically showing the configuration of the resonance device according to the third embodiment.

[0112] In the resonator device 3 according to the third embodiment, the cavity 31 of the upper cover 30 is formed such that the portion facing the front end portions 122A to 122D of the vibrating arms 121A to 121D is deeper than the portion facing the root portions of the vibrating arms 121A to 121D . For example, the bottom plate 32 of the upper cover 30 is formed with concave portions facing the distal end portions 122A to 122D of the vibrating arms 121A to 121D. The recessed portion of the bottom plate 32 also faces a part of the arm portions 123A to 123D of the vibrating arms 121A to 121D. The gap G2 between the front end portions 122A to 122D of the vibrating arms 121A to 121D and the upper cover 30 i...

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PUM

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Abstract

A resonator device (1) is provided with a lower cover (20), an upper cover joined to the lower cover (20), and a resonator (10) having vibrating arms (121A-121D) capable of flexural vibration in an inner space provided between the lower cover (20) and the upper cover (30), the vibrating arms (121A-121D) having tip portions (122A-122D) provided with metal films (125A-125D) on the side facing the upper cover (30), a gap (G2) between the front end portions (122A-122D) of the vibrating arms (121A-121D) and the upper cover (30) is larger than a gap (G1) between the front end portions (122A-122D) of the vibrating arms (121A-121D) and the lower cover (20).

Description

technical field [0001] The present invention relates to a resonator device and a method of manufacturing the same. Background technique [0002] Resonator devices are used in various electronic equipment such as mobile communication terminals, communication base stations, and home appliances, and are used for timing equipment, sensors, oscillators, and the like. Such a resonator device includes, for example, a lower cover, an upper cover forming an inner space with the lower cover, and a resonator having a vibrating arm vibrably held in the inner space. Such a resonance device is, for example, a type of MEMS (MicroElectro Mechanical Systems). [0003] In Patent Document 1, it is disclosed that the frequency of the resonator is adjusted by colliding the front end portion of the excited vibrating arm against the lower cover and the upper cover. [0004] Patent Document 1: International Publication No. 2017 / 212677 [0005] However, according to the frequency adjustment metho...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H03H9/24
CPCH03H9/0595H03H9/1057H03H9/2489H03H3/0077H03H3/0072H03H3/04H03H9/2468
Inventor 福光政和岸武彦樋口敬之
Owner MURATA MFG CO LTD