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Pusher and electronic part-testing apparatus with the same

A technology of electronic components and experimental devices, which is applied to the parts of electrical measuring instruments, electrical components, measuring devices, etc., and can solve the problems of self-damage of bare chips, cracking or broken damage of experimental IC equipment, etc.

Inactive Publication Date: 2006-10-04
ADVANTEST CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] However, when small pieces such as silicon fragments are attached to the pressed surface of the IC device under test, and the pressing surface of the pusher block contacts the pressed surface of the IC device under test, if a pressing force is applied to the IC device under test, then If the load is concentrated on the part where the small piece is attached, it may cause cracking or broken damage to the tested IC device
Especially when the IC device to be tested is an IC device in which the bare chip mounted on the substrate is not sealed by molding resin, it is possible to cause damage to the bare chip itself

Method used

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  • Pusher and electronic part-testing apparatus with the same
  • Pusher and electronic part-testing apparatus with the same
  • Pusher and electronic part-testing apparatus with the same

Examples

Experimental program
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Embodiment Construction

[0036] Hereinafter, embodiments of the present invention will be described with reference to the drawings.

[0037] figure 1It is an overall side view of an IC experiment apparatus showing one embodiment of the electronic component experiment apparatus of the present invention. Fig. 2 is a perspective view showing a processor of the same IC experimental setup. image 3 is a flow chart of the tray showing the processing method of the tested IC. Figure 4 It is a perspective view showing the structure of the IC stocker of the same experimental device. Fig. 5 is a perspective view showing a user tray used in the same IC experimental setup. Figure 6 It is a cross-sectional view of the main part of the test chamber of the same IC experimental device. Fig. 7 is an exploded perspective view showing a part of a test tray used in the same IC experimental device. Figure 8 It is an exploded perspective view showing the structure near the socket of the test head of the same IC expe...

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PUM

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Abstract

A pusher, wherein sharp-pointed projected parts (312) are provided on the surface (311) of a pusher block (31) opposed to the pressed surface (211) of the body part (21) of an IC chip (2), whereby the external terminal of an electronic part can be connected to the connection terminal of a socket without concentratedly applying a load to the portion of the electronic part having deposit adhered thereto even if the deposit such as particles is adhered to the pressed surface thereof, and the electronic part can be tested without providing a damage such as cracking and chipping to the electronic part.

Description

technical field [0001] The present invention relates to a pusher for pressing an electronic component mounted on a socket in an experiment of an electronic component such as an IC chip, and an electronic component experiment apparatus provided with the pusher. Background technique [0002] In the manufacturing process of semiconductor devices, etc., an electronic component experiment device for testing the performance and functions of electronic components such as IC chips that are finally produced is essential. As an example of such an electronic component tester, there is known an IC tester that tests the performance and functions of IC devices such as IC chips under various temperature conditions such as low temperature and high temperature. [0003] For example, an IC device experiment using an IC experiment apparatus is performed as follows. After the IC device to be tested is transported over the test head on which the IC socket is mounted, the IC device to be tested ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01R31/26G01R1/04G01R31/59H01L21/66
CPCG01R1/0483G01R31/01G01R31/59G01R31/26H01L22/00
Inventor 小野寺启一
Owner ADVANTEST CORP
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