The invention discloses a
laser machining device for a surface
microstructure of a thin-wall spherical shell type micro-component, and relates to the technical field of micro-component surface
machining. The problem that due to the fact that traditional
material removal modes such as ultra-precision
cutting are incomplete in
material removal and substandard in contour precision, the manufacturing requirement caused by the nanoscale precision of the surface
microstructure of the thin-wall spherical shell micro-component cannot be met is solved, the device comprises an X / Y / Z / B / C axis movement unit, a Y axis, a B axis and a C axis are sequentially arranged on a horizontal base table board in a stacked mode, and a workpiece is installed on a C axis objective table; the X axis and the Z axis are mounted on a cross beam of the
portal frame in an overlapping manner, the
laser processing head is fixed on a Z-axis
carriage, and the workpiece position change introduced by the swing of the B axis can be compensated through the X axis; according to the device,
laser processing and in-situ detection of the surface
microstructure of the thin-wall spherical shell micro-component are integrated, high-precision adjustment of a movement position, precise regulation and control of laser
pulse energy and precise capturing and recognition of a feature point position can be achieved, and high-precision stable controllable removal of an incomplete part of a
cutting processing material is met.