Intermediate infrared graphene plasmon polariton biochemical sensor
A plasmon and graphene technology, applied in the field of optical sensing, can solve the problems of weak vibration absorption, weak optical enhancement, and unfavorable detection, and achieve the effects of enhanced vibration absorption, high-precision measurement, and improved sensitivity
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[0035] The invention utilizes the super-strong optical field confinement and tunable characteristics of graphene plasmons to realize simultaneous high-precision detection of the complex refractive index and spectrum of trace biochemical materials such as proteins on a highly integrated chip.
[0036] The present invention will be described in detail below in conjunction with the accompanying drawings and specific embodiments.
[0037] Such as figure 1 As shown, a kind of mid-infrared graphene plasmon biochemical sensor provided by the present invention includes a mid-infrared broadband light source (globar) 10, a first mid-infrared lens 20, a graphene plasmon sensing unit 30 and a second Mid-infrared lens 40; the graphene plasmon sensing unit 30 includes a doped silicon substrate 35, a first grating coupling region 31 and a second grating coupling region 34 respectively arranged at both ends of the doped silicon substrate 35, arranged on a doped silicon substrate The sensing ...
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