Machining device for full-surface micro-pit structure of thin-wall spherical shell type micro-component

Abstract

The invention discloses a machining device for a full-surface micro-pit structure of a thin-wall spherical shell type micro-component, and relates to the technical field of micro-component surface machining devices. The problems that under the constraint of the micro-space scale, the thin-wall spherical shell type micro-component has special structural characteristics, is non-uniform in material, asymmetric in surface and has tiny surface defects, and fluid mechanics is not stable in the machining process are solved. According to the machining device, a base is made of granite materials, and therefore vibration can be well absorbed; a high-precision linear unit and a high-precision rotating unit are adopted as main moving parts of the device, and a workpiece clamping system, a high-resolution CCD monitoring system, a zero point positioning system and a turning secondary clamping quick-change system are installed on the base in a centralized mode; the structural design is compact, and the technical problems of clamping, turning, tool setting, capturing and recognizing of the micro-pit structure and the like of the thin-wall spherical shell type micro-component can be effectively solved; and an air static pressure workpiece shaft is adopted for rotational motion of a workpiece, a milling shaft is obliquely arranged, and therefore the high machining speed and the high machining precision can be achieved.

Description

technical field [0001] The invention relates to the technical field of micro-component surface processing devices, in particular to a processing device for micro-pit structures on the entire surface of thin-walled spherical micro-components. Background technique [0002] With the increasing development of modern science and technology, various thin-walled spherical shell micro components with high precision and high surface quality have been widely used in the fields of national defense, military, aerospace, electronics, biomedical and other fields. Usually, the surface shape of these parts requires submicron level shape accuracy, nanometer level surface roughness and minimal subsurface damage. For example, the diameter of thin-walled spherical shell micro-components for energy research is 1-5 mm, and the shell thickness is 20-120 μm. Pit structure, and require the contour error to be better than 0.3μm, the surface roughness Ra to be better than 20nm, and the pit spacing er...

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Problems solved by technology

[0004] In view of the special structural characteristics, non-uniform material, surface asymmetry, fine surface defects and hydrodynamic instability of thin-walled spherical shell micro-components under the constraints of micro-space scale, the purpose of the present invention is to provide a thin-walled spherical shell Processing device for full-surface micropit structure of shell micro-components

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