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Micro integration method-amber cavity array optical spectrum detector

A spectrum detector and photodetector technology, applied in the directions of using multiple reflections to generate spectra, spectrum surveys, spectrum generation, etc., can solve problems such as vibration influence, complex control, and limited light energy utilization, and achieve low cost, high luminous flux, and high resolution effects

Inactive Publication Date: 2007-05-09
CHONGQING UNIV
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Problems solved by technology

[0002] In the prior art, although some major structural improvements have been made in the disclosed micro-spectroscopy system in recent years, none of them can truly realize sensorization, and the existing practical micro-spectrometers still use gratings to split light, which greatly limits Improve the utilization of light energy, and put forward higher requirements for the detector
Northeastern University of the United States is also engaged in the research of micro-interferometric spectrometers, but it uses moving mirror scanning, which makes the control complicated and will be affected by external vibrations

Method used

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Embodiment Construction

[0009] The technical scheme of the present invention will be further described below in conjunction with accompanying drawing:

[0010] In the figure: 1. Incident optical fiber 2. Microlens 3. Antireflection coating 4. Reflective coating 5. Cavity 6. Reflective coating 7. Photodetector array

[0011] As can be seen from Fig. 1, the micro-integrated method-percavity array spectrometer provided by the present invention is formed by anti-reflection film 3, reflective film 4, cavity 5 and reflective film 6 to form a miniature method-percavity array, and each method-percavity The length of the cavity determines the center position of the wavelength it can transmit, and the reflectivity of the reflective film determines the width of the light passband. Each F-P cavity can only transmit light waves of a specific range of wavelengths, thus forming a series of center Narrowband optical filters with different wavelengths. The optical fiber 1 is the light energy input element of the ent...

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Abstract

An integrated spectral detector with miniature Fabry-Perot cavity array has lighting system, photoelectric detector array and miniature Fabry-Perot cavity array between them. Said Fabry-Perot cavity array is composed of the cavities and the reflecting membranes coated on both sides. Each cavity length is correspondent to a particular wavelength. The parallel light beams pass through said cavity array to generate relative electric spectrum signals on the photoelectric detector array. After computer processing, a spectrogram is obtained. Its advantages are high light flux, sensitivity and resolution, small size and low cost.

Description

technical field [0001] The invention belongs to the technical field of spectral analysis instruments, in particular to a micro-integrated method-percavity array spectral detector. Background technique [0002] In the prior art, although some major structural improvements have been made in the disclosed micro-spectroscopy system in recent years, none of them can truly realize sensorization, and the existing practical micro-spectrometers still use gratings to split light, which greatly limits It improves the utilization of light energy and puts forward higher requirements for detectors. Northeastern University of the United States is also engaged in the research of micro-interferometric spectrometers, but it uses moving mirror scanning, which makes the control complicated and will be affected by external vibrations. Contents of the invention [0003] The purpose of the present invention is to address the deficiencies of the prior art, to provide a micro-integrated method-pe...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01J3/26G01J3/28
Inventor 陈刚温志渝温中泉
Owner CHONGQING UNIV
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