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Fluid pump

A technology of fluid pumps, casings, applied in the direction of pumps, parts of pumping devices for elastic fluids, pump elements, etc., capable of solving problems such as operator trouble

Inactive Publication Date: 2004-05-12
TOYOTA IND CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] However, in the prior art, the vacuum pump has to be checked every time it is restarted, which brings great trouble to the operator

Method used

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  • Fluid pump
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Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0014] Now refer to figure 1 , 2A and 2B describe a fluid pump according to a first preferred embodiment of the present invention. In a first preferred embodiment, the fluid pump is a vacuum pump. exist figure 1 In , the left side of the figure is the front side, and the right side of the figure is the rear side.

[0015] Such as figure 1 As shown, a vacuum pump is used in a semiconductor manufacturing process to discharge gaseous reaction products such as ammonium chloride generated in semiconductor processing equipment, which is not shown in the drawings. Ammonium chloride is hereafter referred to as a gas.

[0016] still refer to figure 1 , the vacuum pump includes a pump housing (or pump chamber) H1, a gear housing (or gear chamber) H2 and a motor housing (or motor chamber) H3. The rear end of the pump housing H1 is connected to the front end of the gear housing H2, and the rear end of the gear housing H2 is connected to the front end of the motor housing H3. The p...

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PUM

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Abstract

A fluid pump includes a housing, a drive source, a rotary unit and a pumping mechanism. The drive source is accommodated in the housing and includes a rotary member for rotation. The rotary unit includes the rotary member and a rotary shaft, which is operatively connected to the rotary member for rotation. The rotary unit forming an engaging portion for engaging with a maintenance tool which is prepared outside the housing. The pumping mechanism is placed in the housing and is operated in accordance with the rotation of the rotary shaft. An allowing means is formed in the housing for allowing the maintenance tool to engage with the engaging portion so as to face the engaging portion. The rotary shaft is rotated by rotating the maintenance tool in a state that the maintenance tool is engaged with the engaged portion.

Description

technical field [0001] The invention relates to a fluid pump, which includes a pump device and a drive source located in a casing, the pump device is operated by the rotation of a rotating shaft, and the rotating shaft of the pump device is driven by the driving source. Background technique [0002] Unexamined Japanese Patent Publication No. 8-78300 discloses a fluid pump. In this prior art, a vacuum pump is applied to the production process of semiconductors to discharge gaseous reaction products generated in semiconductor processing equipment. In a vacuum pump, gaseous reaction products may solidify therein. During the operation of the vacuum pump, this solidified substance is discharged to the outside of the vacuum pump along with gaseous reaction products. Therefore, continuous operation of the vacuum pump can be ensured as long as no excessive gas products freeze. [0003] However, a large starting torque is required when the vacuum pump is started again after the va...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): F04B39/00F04B37/16F04C18/12F04C23/00F04C25/02F04C28/06F04C29/00
CPCF04C2220/10F04C28/06F04C29/0042F04C2270/08F04C23/00F04C18/126F04C2220/30F04C2230/80F04C2270/701F04C25/02
Inventor 藏本觉川口真广山本真也星野伸明桑原卫
Owner TOYOTA IND CORP