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Optical waveguide device, its making method and optical communication equipment

A manufacturing method and technology for optical waveguides, which are applied in the directions of optical waveguides, optical waveguides, coupling of optical waveguides, and optical waveguides, and can solve problems such as the proximity of heaters and waveguide cores.

Inactive Publication Date: 2004-05-12
ORMON CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, in order to sufficiently and efficiently heat only a specific waveguide core by the heater, it is necessary to reduce the thickness of the upper cladding layer so that the distance between the heater and the waveguide core is close. In the conventional manufacturing method of the optical waveguide device, it is impossible to bring the heater and the waveguide core close together, and it is impossible to keep the wiring or electrodes of the heater and the waveguide core away from each other.

Method used

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  • Optical waveguide device, its making method and optical communication equipment
  • Optical waveguide device, its making method and optical communication equipment
  • Optical waveguide device, its making method and optical communication equipment

Examples

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no. 1 example

[0063] Figure 5 It is a schematic oblique view of an optical waveguide device 10a (optical attenuator) according to an embodiment of the present invention. Image 6 From Figure 5 The schematic exploded oblique view of the optical waveguide device 10a with the upper cladding layer 14 removed. The optical waveguide device 10a of the present invention consists of an optical waveguide 23 including a glass substrate 11, a lower cladding layer 12, and waveguide cores 13a to 13e formed inside the lower cladding layer 12, and an optical waveguide 23 having an optical fiber that modulates light propagating in the waveguide cores 13b, 13c. Functional light modulator 24 constitutes. Optical modulator 24 is composed of glass plate 15 , electrodes 17 a , 17 b , 17 c , 17 d , lead pads 18 a , 18 b , 18 c , 18 d , and elements (heaters) 19 a , 19 b formed on the lower surface of glass plate 15 . The optical waveguide 23 and the optical modulator 24 are bonded by the upper cladding layer...

no. 2 example

[0079] Figure 14 is a schematic oblique view of the optical modulator 24 of the optical waveguide device according to another embodiment of the present invention. Figure 14 The light modulator 24 shown is illustrated using the first embodiment, as Image 6 As shown, it is used in combination with an optical waveguide having a waveguide core and a cladding surrounding the waveguide core.

[0080] Figure 14 The light modulator 24 shown consists of a glass plate 15, electrodes 17a, 17b, 17c, 17d, lead pads 18a, 18b, 18c, 18d, elements (heaters) 19a, 19b and spacers 22a, 22b. The spacers 22a, 22b are formed only around the through-holes 16a, 16b between the light modulators 24 .

[0081] Next, a method of manufacturing the optical modulator 24 of this embodiment will be described. Such as Figure 15 As shown in (a), a through-hole 16a (16b) penetrating from the surface to the inside is formed on the glass plate 15, and titanium (Ti) is first sputtered or vapor-deposited on...

no. 3 example

[0089] Figure 17 is a schematic plan view of an optical waveguide device 10b (1×4 optical switch) according to still another embodiment of the present invention. Figure 18 is along Figure 17 The cross-sectional view of the C-C' line.

[0090] The optical waveguide device 10b is composed of a glass substrate 11, a lower cladding layer 12, waveguide cores 13a, 13b, 13c, 13d, 13e, 13f, 13g, 13h, 13i, an upper cladding layer 14, and elements (heaters) 19a, 19b. , a glass plate 15 forming through holes 16a, 16b, electrodes 17a-17p, and lead pads 18a-18p formed on electrodes 17a-17p. Through holes 16a, 16b pass through from the top of the glass plate 15 to the bottom, and the elements 19a, 19b below the glass plate 15 and the electrodes 17b, 17c, 17f, 17g, 17i, above the glass plate 15 are connected by the through holes 16a, 16b. 17j, 17k, 17l, 17m, 17n, 17o, 17p are turned on. The lead pads 18a, 18d, 18e, 18h and the electrodes 17a, 17d, 17e, 17h are dummy and not actually u...

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Abstract

An optical wave guide device is manufactured by bonding an optical wave guide to an optical modulator through an upper cladding layer. The optical wave guide includes a glass substrate, a lower cladding layer and cores, and the optical modulator includes elements (heaters), which are disposed on the lower surface of a glass substrate, for modulating the light propagating in the cores, and electrodes and wire bond pads which are disposed on the front surface thereof. The elements are connected to the electrodes via through-holes.

Description

technical field [0001] The present invention relates to an optical waveguide device, a manufacturing method of the optical waveguide device and an optical communication device, in particular to an optical waveguide device for modulating or switching by changing the refractive index of the waveguide core by thermo-optical effect and electro-optic effect. Background technique [0002] In optical communication for performing high-speed and large-capacity data communication, optical cables are mainly used as a transmission network. Depending on the purpose, an optical waveguide or an optical waveguide device with functions such as switching or modulation added to the optical waveguide is used at the connection point of the optical cable. [0003] FIG. 1 is a schematic perspective view of a conventionally used optical waveguide device 1 (1×8 optical switch). The optical waveguide device 1 shown in FIG. 1 consists of a substrate 2, a lower cladding layer 3, and waveguide cores 5a...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B6/12G02B6/125G02B6/13G02B6/34G02F1/01G02F1/03G02F1/313
CPCG02B2006/12135G02F1/3136G02B6/125G02B2006/12154G02F1/0147G02F1/0316G02F1/3137G02B6/12
Inventor 古村由幸速水一行寺川裕佳里细川速美
Owner ORMON CORP